Positive resist composition for electron beam or x-rays

专利摘要:
It is to provide an excellent electron beam or X-ray positive resist composition having a high sensitivity and a resist pattern profile obtained at high resolution having a rectangular shape (particularly, a T-top shape peculiar to an electron beam irradiation resist). In the compound which generate | occur | produces an acid by irradiation of an electron beam or X-ray, and the group which detach | desorbs by the action of an acid, it has the residue of the compound which shows the ionization potential value smaller than the ionization potential value of p-ethylphenol, and by the action of an acid A positive resist composition for an electron beam or X-ray, characterized by containing at least one of a resin having increased solubility in an alkaline developer and an acetal compound having a specific structure.
公开号:KR20030006957A
申请号:KR1020020025232
申请日:2002-05-08
公开日:2003-01-23
发明作者:사사키도모야；미즈타니가즈요시；시라카와고지
申请人:후지 샤신 필름 가부시기가이샤；
IPC主号:

专利说明:

Positive resist composition for electron beam or X-rays {POSITIVE RESIST COMPOSITION FOR ELECTRON BEAM OR X-RAYS}
[1] The present invention relates to an electron beam or a positive resist composition for X-rays, and in particular, a pattern profile obtained by irradiation with electron beams or X-rays is excellent, high sensitivity, high resolution, or an electron beam excellent in the edge roughness of the line pattern and PED stability Or a chemically amplified positive resist composition for X-rays.
[2] Integrated circuits have increased the degree of integration, and in the manufacture of semiconductor substrates such as ultra-LSI, the processing of ultra-fine patterns having a line width of 1/4 micron or less has been required. In order to satisfy the necessity, the wavelength of use of the exposure apparatus used for photolithography is further shortened, and far ultraviolet light and excimer laser light (XeCl, KrF, ArF, etc.) have been examined. Further finer pattern formation is examined by electron beams or X-rays.
[3] In particular, the electron beam or X-ray is positioned as the next generation or next generation pattern formation technology, has a high sensitivity, high resolution, rectangular profile shape, excellent edge roughness of the line pattern, and positive and negative resist with good PED stability. Development of the composition is desired.
[4] Here, the edge roughness means that the edges of the upper and lower portions of the resist pattern vary irregularly in the direction perpendicular to the line direction due to the characteristics of the resist, so that the edges are uneven when the pattern is viewed directly from above.
[5] In addition, PED (Post Exposure Bake) stability is coating film stability in the case of being left out of the irradiation apparatus or the apparatus until the heat treatment is performed after irradiation.
[6] Alternatively, in the case of a positive electron beam or an X-ray resist, the surface is poorly soluble to be subjected to the influence of basic pollutants in the atmosphere or to be exposed to and from inside and outside the irradiation apparatus (drying of the coating film), and in the case of a line pattern, the T-Top shape (The surface becomes a T-shaped hood), and in the case of a contact hole pattern, there is a problem that the surface becomes capping formation (hood formation on the contact hole surface).
[7] On the other hand, in order to prevent capping formation or T-Top formation, there is a problem that film loss occurs when the binder is made hydrophilic.
[8] Partially protected poly (p-hydroxystyrene) as a chemically amplified positive resist is disclosed in Japanese Patent Application Laid-Open No. 9-319092. However, when applied to lithography by ultraviolet and far ultraviolet rays, the sensitivity and pattern formation are excellent. However, when applied to lithography by electron beams or X-rays, it has a drawback that the sensitivity is low, especially that the edge roughness of the line pattern is deteriorated.
[9] In addition, as a mechanism in which acid is generated from an onium salt-type acid generator by an electron beam or a line at a chemically amplified resist width, secondary electrons are emitted after most of the energy of the radiation is absorbed by the matrix polymer, The mechanism in which onium salts are reduced and acid is generated is shown in Journal Phtopolymer Science and Technology Volume 11, No. 4 (1998), pp. 577-580.
[10] The whole process of electron beam or X-ray exposure is usually carried out under high vacuum, but when exposed to high vacuum after exposure, it was a problem to adversely affect the performance stability of the resist.
[11] In view of the above, there is a need for a resist having high sensitivity, high resolution, and excellent PED stability under vacuum. PED stability is coating film stability in the case of being left in the irradiation apparatus or outside the apparatus until the heating operation is performed after irradiation.
[12] The wood crop of the present invention is highly sensitive, and the resist pattern profile obtained at high resolution is rectangular (in particular, the T-top formation peculiar to the electron beam irradiation resist) and the edge pattern of the line pattern and the electron beam or X-ray excellent in PED stability are excellent. It is to provide a positive resist composition.
[13] As a result of the examination for high performance, in the electron beam or X-ray positive resist composition, Ip lower than the ionization potential (Ip: about 8.9 eV) of the p-hydroxystyrene unit (p-ethylphenol) in the group detached by the acid. By using the polymer containing the structure which shows a value, and a specific low molecular weight acetal compound, it was discovered that the resist pattern profile which is high performance, high resolution, and further excellent is obtained.
[14] In addition, by using a specific acid generating compound, a pattern having excellent edge roughness of a line pattern is obtained. Moreover, by using a specific (c ') low molecular weight compound, a pattern with high sensitivity and excellent PED characteristics is obtained. That is, according to this invention, the following positive resist composition for electron beams or X-rays is provided, and the said vision is achieved.
[15] (One). (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
[16] (b1) a resin having a residue of a compound which exhibits an ionization potential value smaller than the ionization potential value of p-ethylphenol in a group detached by the action of an acid, and having increased solubility in an alkaline developer by the action of an acid; And
[17] (c) The positive resist composition for electron beams or X-rays containing 1 or more types of acetal compounds represented by general formula (A) or general formula (B).
[18]
[19] (In formula (A) or (B), R ₁ ′ and R ₂ ′ independently represent an organic group having 1 to 30 carbon atoms.)
[20] (2). (1), wherein the resin (b1) is a resin obtained by reacting an alkali-soluble polymer having a hydroxyl group with a vinyl ether compound represented by the general formula (C) and an alcohol compound represented by the general formula (D) under an acid catalyst. A positive resist composition for electron beam or X-ray, characterized in that.
[21]
[22] (In formula (C), R < ₃ '> represents a C1-C30 organic group.
[23] In formula (D), W represents a divalent organic group. X is an organic group and is group which shows the value of ionization potential (Ip) of HO-X being smaller than the Ip value of p-ethylphenol. n represents the integer of 0-4. When n is 2-4, several W may be same or different.)
[24] (3). (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
[25] (b2) Resin which has a repeating unit represented by Formula (I), and whose solubility to alkaline developing solution increases by the action of an acid; And
[26] (c) at least one of the acetal compounds represented by the general formula (A) or (B) described in (1)
[27] A positive resist composition for electron beams or X-rays, comprising:
[28] Formula (I)
[29]
[30] (In formula (I), R ¹ represents a hydrogen atom or a methyl group. R ² and R ³ each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. W, X and n are the same as above.)
[31] (4). X is represented by Formula (II), The positive resist composition for electron beams or X-rays of (2) characterized by the above-mentioned.
[32] Formula (II)
[33]
[34] (In Formula (II), L is a single bond or an alkylene group, Y is group chosen from following formula (A ')-(E').
[35]
[36] R ^{4 's} each independently represent a linear or branched alkyl group having 1 to 6 carbon atoms. n1 is an integer of 0-3, n2 is an integer of 0-7, n3 is an integer of 0-9, n4 is an integer of 0-9, n5 is an integer of 0-9.)
[37] (5). X is represented by said Formula (II), The positive resist composition for electron beams or X-rays of (3) characterized by the above-mentioned.
[38] (6). The electron beam according to any one of (1) to (5), wherein the total amount of the (c) acetal compound is 0.1 part by weight or more and less than 100 parts by weight with respect to the total weight of the polymer of (b1) or (b2), or X-ray positive resist composition.
[39] (7). In any one of (1)-(5), said (a) is
[40] (a1) The positive resist composition for electron beams or X-rays represented by any one of Formula (I ')-(III') and containing a compound which generate | occur | produces an acid by irradiation of an electron beam or X-rays.
[41]
[42] (Wherein, R ₁ to R ₃₇ are the same or different and represent a hydrogen atom, a straight chain, a branched or cyclic alkyl group, a straight chain, a branched or cyclic alkoxy group, a hydroxyl group, a halogen atom, or a -SR ₃₈ group. R ₃₈ represents a linear, branched or cyclic alkyl group or an aryl group, and two or more of R ₁ to R ₁₅ , R ₁₆ to R ₂₇ , and R ₂₈ to R ₃₇ bond to each other to form a single bond, carbon, or oxygen; Or 1 or 2 or more types selected from sulfur, sulfur, and nitrogen may be contained to form a ring.
[43] X ⁻ represents an anion of sulfonic acid.)
[44] (8). The total amount of the (c) acetal compound is 0.1 part by weight or more and less than 100 parts by weight with respect to the total weight of the polymer of (b1) or (b2) according to any one of (1) to (5). (a)
[45] (a1) A positive resist composition for an electron beam or X-ray, characterized by containing a compound which generates an acid by irradiation with an electron beam or X-ray represented by any one of the formulas (I ') to (III').
[46] (9). (a2) A compound represented by any one of formulas (I ") to (IV") and generating an acid by electron beam or X-ray irradiation;
[47] (b1) a resin having a residue of a compound which exhibits an ionization potential value smaller than the ionization potential value of p-ethylphenol in a group detached by the action of an acid, and having increased solubility in an alkaline developer by the action of an acid; And
[48] (d) solvent
[49] A positive resist composition for electron beam or X-ray, characterized by containing a.
[50]
[51]
[52] In formula (I "), Ar <^3> , Ar <^4> respectively independently represents a substituted or unsubstituted alkyl group, an aryl group, an aralkyl group, or a camphor group.
[53] In formula (II "), R ²⁰⁶ represents a substituted or unsubstituted alkyl, aryl, aralkyl or camphor group. A represents a substituted or unsubstituted alkylene, alkenylene or arylene group.
[54] In formulas (III ") and (IV"), R ⁰ and R each independently represent an alkyl group or an aryl group which may have a substituent.)
[55] (10). The positive resist composition for electron beams or X-rays according to (9), wherein the resin (b1) contains a repeating unit represented by formula (I).
[56] Formula (I)
[57]
[58] (In formula (I), R <^1> represents a hydrogen atom or a methyl group, R <^2> , R <^3> respectively independently represents a hydrogen atom or a C1-C4 alkyl group. W, X, and n are the same as the above.)
[59] (11). The positive resist composition for electron beams or X-rays according to (9) or (10), wherein the compound of (a2) generates an aromatic sulfonic acid.
[60] (12). The positive resist composition for electron beams or X-rays according to (9) or (10), wherein the compound of (a2) generates fluorine-containing sulfonic acid.
[61] (13). The positive resist composition for electron beams or X-rays according to (9) or (10), wherein the compound of (a2) generates aromatic sulfonic acid and fluorine-containing sulfonic acid.
[62] (14). The positive resist composition for electron beams or X-rays according to (9) or (10), wherein the compound (a2) generates an aromatic sulfonic acid containing fluorine.
[63] (15). In addition to the compound of said (a2) in (9) or (10),
[64] (a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by electron beam or X-ray irradiation.
[65] (16). The compound of (9) or (10), wherein the compound of (a2) generates an aromatic sulfonic acid,
[66] (a1) A compound represented by any one of the formulas (I ') to (III') and generating an acid by irradiation with an electron beam or X-ray
[67] A positive resist composition for electron beams or X-rays, further comprising:
[68] (17). The compound of (9) or (10), wherein the compound of (a2) generates fluorine-containing sulfonic acid,
[69] (a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by irradiation of an electron beam or X-rays.
[70] (18). The compound of (9) or (10), wherein the compound of (a2) generates aromatic sulfonic acid and fluorine-containing sulfonic acid,
[71] (a1) A compound represented by any one of the formulas (I ') to (III') and generating an acid by irradiation with an electron beam or X-ray
[72] A positive resist composition for electron beams or X-rays, further comprising:
[73] (19). The compound of (9) or (10), wherein the compound of (a2) generates an aromatic sulfonic acid containing fluorine,
[74] (a1) The positive resist composition for an electron beam or X-ray, represented by any one of the formulas (I ') to (III'), further comprising a compound which generates an acid by irradiation with an electron beam or X-ray.
[75] (20). (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
[76] (b) resins having increased solubility in alkaline developing solutions due to the action of acids;
[77] (c ') a low molecular weight compound having a residue of a compound whose ionization potential (Ip) value is smaller than the Ip value of p-ethylphenol and stable to acid; And
[78] (d) solvent
[79] A positive resist composition for electron beam or X-ray, characterized by containing a.
[80] (21). The positive resist composition for electron beams or X-rays according to (20), wherein the compound of (c ') is represented by formula (E).
[81] Formula (E)
[82]
[83] (X ': group in which the ionization potential (Ip) value of H-X' shows a value smaller than the Ip value of p-ethylphenol.
[84] W: divalent organic group
[85] Z is independently -OH, -OR ', -O-CO-R', -O-CO-OR ', -O-CO-NH-Ra, -O-CO-N (Ra) (Rb),- NH-CO-R ', -NH-CO-OR', -NH-SO ₂ -R ', -NRa-CO-R', -NRa-CO-OR ', -NRa-SO ₂ -R',- CO-OR ', -CO-NH-Ra, -CO-NH-SO ₂ -R, -CO-NRa-SO ₂ -R', -CO-N (Ra) (Rb), -CN Being.
[86] R ', Ra, Rb: The C1-C10 alkyl group or aryl group which may respectively independently have a substituent.
[87] n is an integer of 1-3.
[88] When n is 2-4, some W may be same or different.)
[89] (22). X 'in Formula (E) is group chosen from Formula (A')-(E '), The positive resist composition for electron beams or X-rays of (21) characterized by the above-mentioned.
[90]
[91] (R ⁴ each independently represents a linear or branched alkyl group having 1 to 6 carbon atoms. N1 is an integer of 0 to 3, n2 is an integer of 0 to 7, n3 is an integer of 0 to 9, n4 is 0 to 9 Integer, n5 represents the integer of 0-9.)
[92] (23). The positive resist composition for electron beams or X-rays according to any one of (20) to (22), wherein the compound of (a) generates an aromatic sulfonic acid.
[93] (24). The positive resist composition for electron beams or X-rays according to any one of (20) to (22), wherein the compound of (a) generates fluorine-containing sulfonic acid.
[94] (25). The positive resist composition for electron beams or X-rays according to any one of (20) to (22), wherein the compound of (a) generates aromatic sulfonic acid and fluorine-containing sulfonic acid.
[95] (26). The positive resist composition for electron beams or X-rays according to any one of (20) to (22), wherein the compound of (a) generates an aromatic sulfonic acid containing fluorine.
[96] (27). In any one of (1)-(26), X <^->
[97] At least one fluorine atom,
[98] Linear, branched or cyclic alkyl groups substituted with at least one fluorine atom,
[99] Linear, branched or cyclic alkoxy groups substituted with at least one fluorine atom,
[100] An acyl group substituted with at least one fluorine atom,
[101] An acyloxy group substituted with at least one fluorine atom,
[102] Sulfonyl groups substituted with at least one fluorine atom,
[103] Sulfonyloxy groups substituted with at least one fluorine atom,
[104] Sulfonylamino groups substituted with at least one fluorine atom,
[105] An aryl group substituted with at least one fluorine atom,
[106] An aralkyl group substituted with at least one fluorine atom, and
[107] An alkoxycarbonyl group substituted with at least one fluorine atom,
[108] A positive resist composition for electron beams or X-rays, characterized in that it is an anion of benzenesulfonic acid, naphthalenesulfonic acid or anthracenesulfonic acid having at least one kind substituted with.
[109] (28) The positive resist composition for electron beams or X-rays according to any one of (1) to (27), which mainly contains propylene glycol monomethyl ether acetate as a solvent.
[110] (29) The positive resist composition for electron beams or X-rays according to any one of (1) to (28), further comprising (e) an organic basic compound.
[111] (30) The positive resist composition for electron beams or X-rays according to any one of (1) to (29), further comprising (f) a fluorine-based and / or silicon-based surfactant.
[112] In the present invention,
[113] By using specific resin [(b1) or (b2)] and specific low molecular acetal compound (c), the positive resist composition for electron beams or X-rays excellent in high sensitivity, high resolution, and a resist pattern profile is obtained.
[114] By using a specific acid generator (a2) and a specific resin [(b1) or (b2)], an electron beam or an X-ray positive resist composition excellent in high sensitivity, high resolution, and furthermore, the edge roughness of the line pattern is obtained.
[115] By using a specific low molecular weight compound (c '), the electron beam or X-ray positive resist composition excellent in high sensitivity, high resolution, and PED stability is obtained.
[116] (Example)
[117] EMBODIMENT OF THE INVENTION Hereinafter, the positive resist composition for electron beams or X-rays (henceforth a positive electron beam or X-ray resist composition) of this invention is demonstrated.
[118] [I] (a) A compound that generates an acid by irradiation with an electron beam or X-ray (hereinafter also referred to as "component (a)")
[119] As a component (a), as long as it is a compound which generate | occur | produces an acid by irradiation of an electron beam or X-ray, either can be used, but (a1) The compound represented by general formula (I ')-(III') or (a2) Formula ( Preferred are the compounds represented by I ″) to (IV).
[120] In the general formulas (I ') to (III'), as the linear or branched alkyl group of R ₁ to R ₃₈ , a methyl group, ethyl group, propyl group, n-butyl group or sec-butyl group which may have a substituent and 1-4 carbon atoms, such as t-butyl group. Examples of the cyclic alkyl group include those having 3 to 8 carbon atoms such as a cyclopropyl group, a cyclopentyl group and a cyclohexyl group which may have a substituent.
[121] As a linear, branched alkoxy group of R <_1> -R <_37> , for example, a methoxy group, an ethoxy group, a hydroxyethoxy group, a propoxy group, n-butoxy group, isobutoxy group, sec-butoxy group, t-butoxy group The same C1-C4 thing is listed.
[122] As a cyclic alkoxy group, a cyclopentyloxy group and a cyclohexyloxy group are mentioned, for example.
[123] As a halogen atom of R <_1> -R <_37> , a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom are mentioned.
[124] Examples of the aryl group for R ₃₈ include those having 6 to 14 carbon atoms which may have a substituent such as a phenyl group, tolyl group, methoxyphenyl group or naphthyl group.
[125] As these substituents, Preferably, they have a C1-C4 alkoxy group, a halogen atom (fluorine atom, a chlorine atom, an iodine atom), a C6-C10 aryl group, a C2-C6 alkenyl group, a cyano group, a hydroxyl group, a carboxyl group , Alkoxycarbonyl groups and nitro groups are listed.
[126] In addition, two or more of R ₁ to R ₁₅ , R ₁₆ to R ₂₇ , and R ₂₈ to R ₃₇ may be bonded to each other to form one or more selected from a single bond, carbon, oxygen, sulfur, and nitrogen. As a ring containing, a furan ring, a dihydrofuran ring, a pyran ring, a trihydropyran ring, a thiophene ring, a pyrrole ring is mentioned, for example.
[127] In General Formulas (I ') to (III'), X ⁻ is an anion of sulfonic acid.
[128] As examples, condensed polynuclear aromatic sulfonic anions, anthraquinone sulfonic anions, sulfonic acid group-containing dyes such as perfluoroalkanesulfonic anion such as CF ₃ SO ₃ , pentafluorobenzenesulfonate anion, naphthalene-1-sulfonate anion, and the like Although it may be mentioned, it is not limited to these.
[129] Especially, it is more preferable that X <^-> is an anion of benzenesulfonic acid, naphthalene sulfonic acid, or anthracene sulfonic acid which has at least 1 sort (s) chosen from the following group.
[130] At least one fluorine atom
[131] Linear, branched or cyclic alkyl groups substituted with at least one fluorine atom
[132] Linear, branched or cyclic alkoxy groups substituted with at least one fluorine atom
[133] Acyl group substituted with at least one fluorine atom
[134] Acyloxy group substituted with at least one fluorine atom
[135] Sulfonyl groups substituted with at least one fluorine atom
[136] Sulfonyloxy groups substituted with at least one fluorine atom
[137] Sulfonylamino groups substituted with at least one fluorine atom
[138] Aryl groups substituted with at least one fluorine atom
[139] An aralkyl group substituted with at least one fluorine atom, and
[140] Alkoxycarbonyl groups substituted with at least one fluorine atom
[141] The linear, branched or cyclic alkyl group preferably has 1 to 12 carbon atoms and is substituted with 1 to 25 fluorine atoms. Specifically, trifluoromethyl group, pentafluoroethyl group, 2,2,2-trifluoroethyl group, heptafluoropropyl group, heptafluoroisopropyl group, perfluorobutyl group, perfluorooctyl group, purple Luorododecyl group, a perfluoro cyclohexyl group, etc. are mentioned. Especially, the C1-C4 perfluoroalkyl group all substituted by the fluorine atom is preferable.
[142] As said linear, branched or cyclic alkoxy group, it is preferable that C1-C12 is substituted by 1-25 fluorine atoms. Specifically, trifluoromethoxy group, pentafluoroethoxy group, pentafluoroisopropyloxy group, perfluorobutoxy group, perfluorooctyloxy group, perfluorododecyloxy group, perfluorocyclohexyl ox Season, etc. can be mentioned. Preferred is a C 1-4 perfluoroalkoxy group all substituted with fluorine atoms.
[143] The acyl group preferably has 2 to 12 carbon atoms and is substituted with 1 to 23 fluorine atoms. Specifically, trifluoroacetyl group, fluoroacetyl group, pentafluoropropionyl group, pentafluorobenzoyl group, etc. can be mentioned.
[144] The acyloxy group preferably has 2 to 12 carbon atoms and is substituted with 1 to 23 fluorine atoms. Specifically, a trifluoroacetoxy group, a fluoroacetoxy group, a pentafluoropropionyloxy group, a pentafluorobenzoyloxy group, etc. are mentioned.
[145] The sulfonyl group preferably has 1 to 12 carbon atoms and is substituted with 1 to 25 fluorine atoms. Specifically, trifluoromethanesulfonyl group, pentafluoroethanesulfonyl group, perfluorobutanesulfonyl group, perfluorooctanesulfonyl group, pentafluorobenzenesulfonyl group, 4-trifluoromethylbenzenesulfonyl group, etc. are mentioned. Can be.
[146] The sulfonyloxy group preferably has 1 to 12 carbohydrates and is substituted with 1 to 25 fluorine atoms. Specifically, a trifluoromethanesulfonyloxy, a perfluorobutanesulfonyloxy group, 4-trifluoromethylbenzenesulfonyloxy group, etc. are mentioned.
[147] The sulfonylamino group preferably has 1 to 12 carbon atoms and is substituted with 1 to 25 fluorine atoms. Specifically, a trifluoromethanesulfonylamino group, a perfluorobutanesulfonylamino group, a perfluorooctanesulfonylamino group, a pentafluorobenzenesulfonylamino group, etc. are mentioned.
[148] The aryl group preferably has 6 to 14 carbon atoms and is substituted with 1 to 9 fluorine atoms. Specifically, pentafluorophenyl group, 4-trifluoromethylphenyl group, heptafluoronaphthyl group, nonafluoro anthranyl group, 4-fluorophenyl group, 2,4-difluorophenyl group, etc. are mentioned.
[149] The aralkyl group preferably has 7 to 10 carbon atoms and is substituted with 1 to 15 fluorine atoms. Specifically, pentafluorophenylmethyl group, pentafluorophenylethyl group, perfluorobenzyl group, perfluorophenethyl group, etc. are mentioned.
[150] As said alkoxycarbonyl group, it is preferable that hydrocarbon is 2-13 and is substituted by 1-25 fluorine atoms. Specific examples thereof include a trifluoromethoxycarbonyl group, pentafluoroethoxycarbonyl group, pentafluorophenoxycarbonyl group, perfluorobutoxycarbonyl group, and perfluorooctyloxycarbonyl group.
[151] Most preferable X <^{-> is} fluorine-substituted benzene sulfonate anion, and especially a pentafluorobenzene sulfonate anion is especially preferable.
[152] In addition, the benzene sulfonic acid, naphthalene sulfonic acid, or anthracene sulfonic acid having the fluorine-containing substituent group may also be linear, branched or cyclic alkoxy, acyl, acyloxy, sulfonyl, sulfonyloxy, sulfonylamino or aryl groups. , Aralkyl group, alkoxycarbonyl group (the carbon number range is the same as above), halogen (fluorine atom removal), hydroxyl group, nitro group and the like may be substituted.
[153] The specific example of a compound represented by general formula (I ') is shown below.
[154]
[155]
[156]
[157]
[158]
[159] The specific example of a compound represented by general formula (II ") is shown below.
[160]
[161]
[162] The specific example of a compound represented by general formula (III) is shown below.
[163]
[164]
[165]
[166]
[167] Examples of acid generators other than the compounds represented by General Formulas (I ′) to (III ′) are listed below.
[168]
[169]
[170]
[171] The compound represented by general formula (I ')-(III') may be used 1 type or in combination or 2 or more types.
[172] Compounds of the general formulas (I ') and (II') include a sulfonic acid reacting with a triarylsulfonium halide obtained by, for example, reacting a substituted or unsubstituted phenyl sulfoxide with an aryl grignard reagent such as aryl magnesium bromide. Method for salt exchange, method for condensation and salt exchange of an aromatic compound reacting with substituted or unsubstituted phenylphenylsulfoxide using an acid catalyst such as methanesulfonic acid / diphosphate pentoxide or aluminum chloride, or diarylionium salt and diarylsul The feed can be synthesized by a method such as condensation or salt exchange using a catalyst such as copper acetate.
[173] The compound of formula (III ') can be synthesized by reacting an aromatic compound with a periodate.
[174] The sulfonic acid or sulfonic acid salt used for salt exchange can be obtained by hydrolysis of commercially available sulfonic acid chloride, a method of reacting an aromatic compound with chlorosulfonic acid, a method of reacting an aromatic compound with sulfamic acid, and the like.
[175] Hereinafter, the synthesis | combining method of the specific compound of general formula (I ')-(III') is shown below.
[176] (Synthesis of pentafluorobenzenesulfonic acid tetramethylammonium salt)
[177] 25 g of pentafluorobenzenesulfonyl chloride was dissolved in 100 ml of methanol under ice cooling, and 100 g of a 25% tetramethylammonium hydroxide aqueous solution was slowly added thereto. After stirring for 3 hours at room temperature, a solution of pentafluorobenzenesulfonic acid tetramethylammonium salt was obtained. This solution was used for salt exchange with sulfonium salts, iodonium salts.
[178] (Synthesis of triphenylsulfonium pentafluorobenzenesulfonate: synthesis of specific example (I′-1))
[179] Diphenyl sulfoxide 509 was dissolved in 800 ml of benzene, and 200 g of aluminum chloride was added thereto, and the mixture was refluxed for 24 hours. The reaction solution was slowly poured into 2 L of water, and 400 ml of concentrated hydrochloric acid was added thereto, followed by heating at 70 ° C. for 10 minutes. This aqueous solution was washed with 500 ml of ethyl acetate, and after filtration, a solution of 200 g of ammonium iodide dissolved in 400 ml of water was added.
[180] The precipitated powder was collected by filtration, washed with water, washed with ethyl acetate and dried to obtain 70 g of triphenylsulfonium iodide.
[181] 30.5 g of triphenylsulfonium iodide was dissolved in 1000 ml of methanol, 19.1 g of silver oxide was added to this solution, and the mixture was stirred at room temperature for 4 hours. The solution was filtered and an excess solution of the pentafluorobenzenesulfonate tetramethylammonium salt synthesized above was added thereto. The reaction solution was concentrated, which was dissolved in 500 ml of dichloromethane, and the solution was washed with 5% tetramethylammonium hydroxide aqueous solution and water. The organic phase was dried over anhydrous sodium sulfate, and then concentrated to give triphenylsulfonium pentafluorobenzenesulfonate.
[182] (Synthesis of Triarylsulfoniumpentafluorobenzenesulfonate: Synthesis of mixture of embodiment (I'-9) and (II'-1))
[183] To a solution of pentafluorobenzenesulfonate tetramethylammonium salt in excess of 50 g of triarylsulfonium chloride (Fluka, triphenylsulfonium chloride 50% aqueous solution) was dissolved in 500 ml of water. Precipitated. The supernatant was removed by supernatant separation, and the oily substance obtained was washed with water and dried to obtain triarylsulfonium pentafluorobenzenesulfonate (specifically (I-9) and (II-1) as main components).
[184] (Synthesis of di (4-t-amylphenyl) iodonium pentafluorobenzenesulfonate; Synthesis of embodiment (III-1))
[185] 60 g of t-amylbenzene, 39.5 g of potassium iodide, 81 g of acetic anhydride, and 170 ml of dichloromethane were mixed, and 66.8 g of concentrated sulfuric acid was slowly added dropwise thereto under ice-cooling. After 2 hours of stirring under ice cooling, the mixture was stirred at room temperature for 10 hours. 500 ml of water was added to the reaction liquid under ice cooling, and this was precipitated with dichloromethane, and the organic phase was washed with sodium bicarbonate and water, and then concentrated to give di (4-t-amylphenyl) iodium sulfate. This sulfate was added to a solution of excess pentaflurobenzenesulfonic acid tetramethylammonium salt. 500 ml of water was added to this solution, and this was precipitated with dichloromethane and the organic phase was washed with 5% aqueous tetramethylammonium hydroxide solution and water, and then concentrated to give di (4-t-amylphenyl) iodiumpentaple Orobenzenesulfonate was obtained.
[186] Other compounds can also be synthesized by using the same method.
[187] The acid generator of (a2) is a disulfone derivative represented by general formula (I "), an imide sulfonate derivative represented by general formula (II"), a diazodisulfone derivative represented by general formula (III '), And diazoketosulfone derivatives represented by the general formula (IV ″).
[188] In formulas (I ″) and (II ″), Ar ³ and Ar ⁴ each independently represent a substituted or unsubstituted alkyl group, aryl group, aralkyl group or camphor group. R ²⁰⁶ represents a substituted or unsubstituted alkyl group, aryl group, aralkyl group or camphor group. A represents a substituted or unsubstituted alkylene group, alkenylene group, arylene group.
[189] The alkyl group may be linear, branched, or cyclic. As a linear or branched alkyl group, a C1-C4 alkyl group is mentioned, for example, a methyl group, an ethyl group, a propyl group, n-butyl group, a sec-butyl group, t-butyl group, etc. are mentioned. As a cyclic alkyl group, C3-C8 alkyl groups, such as a dichloropropyl group, a cyclopentyl group, and a cyclohexyl group, are mentioned, for example.
[190] Aryl groups include C6-C14 aryl groups, such as a phenyl group, a tolyl group, a methoxyphenyl group, and a naphthyl group.
[191] Aralkyl groups include phenylmethyl group, phenylethyl group, naphthylmethyl group, naphthylethyl group, anthrylmethyl group and the like.
[192] As an alkylene group and arylene group of A, the bivalent group corresponding to the said alkyl group and an aryl group is mentioned. Examples of the alkenylene group include vinylene group, propenylene group, arylene group, butenylene group and the like.
[193] The alkyl group, the aryl group, the alkylene group, the alkenylene group, and the arylene group may further combine a substituent to a part of any one group to increase the carbon number, or may not have a substituent. Substituents which may be further bonded are preferably a C1-4 alkoxy group, a C6-10 aryl group, a C2-6 alkenyl group, and a cyano group, a hydroxy group, a carboxyl group, an alkoxycarbonyl group and a nitro group. And the like. In addition, a halogen atom may be sufficient. For example, a fluorine atom, a chlorine atom, and an iodine atom are mentioned.
[194] The alkyl group, alkoxy group, alkoxycarbonyl group having 1 to 10 carbon atoms may be substituted at any position of the aryl group.
[195] Although the compound shown below is mentioned as a specific example, It is not limited to these.
[196]
[197]
[198]
[199]
[200]
[201]
[202]
[203]
[204] In General Formula (III ″), R ⁰ and R each independently represent an alkyl group or an aryl group which may have a substituent.
[205] Here, as an alkyl group, a linear or branched alkyl group and a cyclic alkyl group are mentioned. As a linear or branched alkyl group, a C1-C20 linear or branched alkyl group is preferable, More preferably, a C1-C12 linear or branched alkyl group is preferable. As a cyclic alkyl group, a cyclopentyl group or a cyclohexyl group is preferable. As an aryl group, the aryl group which may have a C6-C10 substituent is preferable.
[206] Examples of the substituent which may be possessed by an alkyl group or an aryl group as R ⁰ or R include, for example, an alkoxy group (preferably having 1 to 4 carbon atoms, for example, a methoxy group, an ethoxy group, a propoxy group, butoxy group) and an aryl group (preferably C6-C14, for example, a phenyl group, a naphthyl group, an alkoxycarbonyl group (preferably C1-C5), a halogen atom, a nitro group, an acetyl group, etc. are mentioned.
[207] In addition, regarding the aryl group as R ⁰ or R, as an example of the substituent, an alkyl group (preferably having 1 to 12 carbon atoms, for example, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i) -Butyl group, s-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-octyl group, 2-ethylhexyl group, nonyl group, decyl group, and dodecyl group) are mentioned.
[208] The following compounds are mentioned as a specific example of the diazo disulfone derivative compound represented by general formula (III ").
[209] Bis (methylsulfonyl) diazomethane, bis (ethylsulfonyl) diazomethane, bis (propylsulfonyl) diazomethane, bis (1-methylpropylsulfonyl) diazomethane, bis (butylsulfonyl) dia Crude methane, bis (1-methylbutylsulfonyl) diazomethane, bis (heptylsulfonyl) diazomethane, bis (octylsulfonyl) diazomethane, bis (nonylsulfonyl) diazomethane, bis (decylsul Ponyyl) diazomethane, bis (dodecylsulfonyl) diazomethane, bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (benzylsulfonyl) diazomethane, Bis (2-chlorobenzylsulfonyl) diazomethane, bis (4-chlorobenzylsulfonyl) diazomethane, bis (phenylsulfonyl) diazomethane, bis (4-methoxyphenylsulfonyl) diazomethane, Bis (2-methylphenylsulfonyl) diazomethane, bis (3-methylphenylsulfonyl) diazomethane, bis (4-methylphenylsulfonyl) diazomethane, bis (2,4-dimethylphenylsulfonyl) diazom , Bis (2,5-dimethylphenylsulfonyl) diazomethane, bis (3,4-dimethylphenylsulfonyl) diazomethane, bis (2,4,6-trimethylphenylsulfonyl) diazomethane, bis ( 4-fluorophenylsulfonyl) diazomethane, bis (2,4-difluorophenylsulfonyl) diazomethane, bis (2,4,6-trifluorophenylsulfonyl) diazomethane, bis ( 4-nitrophenylsulfonyl) diazomethane.
[210] In general formula (IV "), as R <^0> , R is the same as that of general formula (III"), respectively, The following compound is mentioned as a specific example of a diazo keto sulfone derivative compound.
[211] Methylsulfonyl-benzoyl-diazomethane, ethylsulfonyl-benzoyl-diazomethane, methylsulfonyl-4-bromobenzoyl-diazomethane, ethylsulfonyl-4-bromobenzoyl-diazomethane, phenylsul Phenyl-benzoyl-diazomethane, phenylsulfonyl-2-methylbenzoyl-diazomethane, phenylsulfonyl-3-methylbenzoyl-diazomethane, phenylsulfonyl-4-methylbenzoyl-diazomethane, phenylsulfonyl 3-methoxybenzoyl-diazomethane, phenylsulfonyl-4-methoxybenzoyl-diazomethane, phenylsulfonyl-3-chlorobenzoyl-diazomethane, phenylsulfonyl-4-chlorobenzoyl-diazomethane , Tolylsulfonyl-3-chlorobenzoyl-diazomethane, tolylsulfonyl-4-chlorobenzoyl-diazomethane, phenylsulfonyl-4-fluorobenzoyl-diazomethane-tolylsulfonyl-4-fluorobenzoyl Diazomethane.
[212] The disulfone derivative represented by the general formula (I ″) reacts the sulfonyl chloride compound with hydrazine under basic conditions in a suitable solvent such as pyridine and tetrahydrofuran, and synthesizes symmetric or asymmetric bissulfonylhydrazine, This can be obtained by performing denitrification with concentrated nitric acid.
[213] The imide sulfonate derivative represented by general formula (II ") can be synthesized by reacting N-hydroxyimide with a corresponding sulfonic acid chloride under basic conditions in a suitable solvent.
[214] Diazodisulfone derivatives represented by general formula (III ") and diazoketosulfone derivatives represented by general formula (IV") can be synthesized by the synthesis method disclosed in Japanese Patent Laid-Open No. 5-249682.
[215] In this invention, you may use together 1 type (s) or 2 or more types of compounds represented by the said general formula (I ")-(IV").
[216] In the present invention, the component (a) to be used is not limited to a compound which decomposes by irradiation of the above electron beam or X-ray to generate an acid, and is a photoinitiator for photocationic polymerization, a photoinitiator for photoradical polymerization, and a photoreceptor for pigments. The well-known compound which generate | occur | produces an acid by irradiation of the electron beam or X-ray used for a colorant, a photochromic agent, a microresist, etc., and its mixture can be selected suitably, and can be used.
[217] For example, S.I. Schlesinger, Photogr. Sci. Eng., 18, 387 (1974), T.S. Diazonium salts described in Bal et al, Polymer, 21, 423 (1980), etc., ammonium salts described in US Pat. Nos. 4,069,055, 4,069,056, Re27,992, Japanese Patent Application Laid-Open No. 3-140,140, and the like. Necker et al, Macromolecules, 17, 2,468 (1984), C.S. Wen et al, Teh Proc. Conf. Rad. Phosphonium salts described in Curing ASIA, p478, Tokyo, Oct (1988), US Pat. No. 4,069,055, US Pat. No. 4,069,056, etc., J.V. Crivello et al., Macromorecules, 10 (6), 1307 (1977), Chem. & Eng. News, Nov. 28, p31 (1988), European Patent No. 104,143, US Patent No. 339,049, US Patent No. 410,201, Japanese Patent Application Laid-Open No. 2-150,848, Japanese Patent Application Laid-open No. Hei 2-296,514 and the like, J.V. Crivello et al ,. Polymer J. 17, 73 (1985), J.V. Crivello et al, J. Org. Chem., 43, 3055 (1978), W. R. Watt et al, J. Polymer Sci., Polymer Chem. Ed., 22, 1789 (1984), J.V. Crivello et al, Polymer Bull., 14, 279 (1985), J.V. Crivello et al, Macromolecules, 14 (5), 1141 (1981), J.V. Crivello et al, J. Polymer Sci., Polymer Chem. Ed., 17, 2877 (1979), European Patents 370,693, 3,902,114, 233,567, 297,443, 297,442, US Patent 4,933,377, 161,811, 410,201, 4,760,013, Sulfonium salts described in 4,734,444, 2,833,827, 2,904,626, 3,604,580, 3,604,581, etc. Crivello et al, Macromorecules, 10 (6), 1307 (1977), J. V. Crivello et al, J. Polymer Sci., Polymer Chem. Ed., 17, 1047 (1979) et al. Selenium, C.S. Wen et al, Teh. Proc. Conf. Rad. Curing ASIA, p478, Tokyo. Onium salts such as arsonium salts described in Oct (1988), US Patent No. 3,905,815, Japanese Patent Publication No. 46-4,605, Japanese Patent Application Publication No. 48-36,281, Japanese Patent Application Publication No. 55-32,070, Japanese Patent Application Publication No. 60-239,736 Organic Patent No. 61-169,835, Patent Publication No. 61-169,837, Patent Publication No. 62-58,241, Patent Publication No. 62-212,401, Patent Publication No. 63-70,243, Patent Publication No. 63-298,339, etc. Halogen compounds, K. Meier et al, J. Rad. Curing, 13 (4), 26 (1986), T.P. Gill et al, Inorg. Chem., 19, 3007 (1980), D. Astruc. Acc. Chem. Organometallic / organic halides described in Res., 19 (12), 377 (1896), Japanese Patent Laid-Open No. H-2161,445, and the like, S. Hayase et al, J. Polymer Sci., 25, 753 (1987), E. Reichmanis et al, J. Polymer Sci., Polymer Chem. Ed., 23, 1 (1985), Q. Q. Zhu et al., J. Photochem., 36, 85, 39, 317 (1987), B. Amit et al, Tetrahedron Lett., (24) 2205 (1973), D.H.R. Barton et al, J. Chem. Soc., 3571 (1965), P.M. Collins et al, J. Chem. So C., Perkin I, 1695 (1975), M. Rudinstein et al, Tetrahedron Lett., (17), 1445 (1975), J.W. Walker et al, J. Am. Chem. Soc., 110, 7170 (1988), S.C. Busman et al., J. Imaging Technol., 11 (4), 191 (1985), H.M. Houlihan et al., Macromolecules, 21, 2001 (1988), P.M. Collins et al, J. Chem. Soc., Chem. Commun., 532 (1972), S. Hayase et al, Macromolecules, 18, 1799 (1985), E. Reichamanis et al, J. Electrochem. Soc., Solid State Sci. Technol., 130 (6), F.M. Houlihan et al, Macromolcules, 21, 2001 (1998), European Patents 290,750, 046,083, 156,535, 271,851 and 0, 388,343, US Patents 3,901,710 and 4,181,531, Japanese Patent Publication Photoacid generators having an o-nitrobenzyl type protecting group described in Japanese Patent Application Laid-Open No. 60-198,538, Patent Publication No. 53-133,022 and the like; M. TUNOOKA et al, Polymer Preprints Japan, 35 (8), G. Berner et al, J. Rad. Curing, 13 (4), W.J. Mijs et al., Coating Technol., 55 (697), 45 (1983), Akzo, H. Adachi et al., Polymer Preprints, Japan, 37 (3), European Patent No. 0199,672, 84,515, 199,672 Iminosulfonates described in Japanese Patent Application Laid-Open No. 64-44,115, 044,115, 0,101,122, U.S. Patent No. 618,564, 4,371,605, 4,371,605, 4,431,774, Japanese Patent Publication No. 64-18,143, The compound which generate | occur | produces sulfonic acid by photolysis represented by the following, and the disulfone compound of Unexamined-Japanese-Patent No. 61-166,544 etc. are mentioned.
[218] Moreover, the compound which introduce | transduced the group or compound which generate | occur | produces an acid by irradiation of these electron beams or X-rays in the main chain or side chain of a polymer, for example, M.E. Woodhouse et al, J. Am. Chem. Soc., 104, 5586 (1982), S.P. Pappas et al., J. Imaging Sci., 30 (5), 218 (1986), S. Kondo et al, Makromol. Chem., Rapid Commun., 9, 625 (1988), Y. Yamada et al, Makromol. Chem., 152, 153, 163 (1972), J.V. Crivello et al, J. Polymer Sci., Polymer Chem. Ed., 17, 3845 (1979), US Patent No. 3,849,137, German Patent No. 3,914,407, Japanese Patent Publication No. 63-26,653, Japanese Patent Publication No. 55-64,824, Japanese Patent Publication No. 62-69,263, and Japanese Patent Publication The compounds described in 63-146,038, Patent Publication No. 63-163,452, Patent Publication No. 62-153,853, Patent Publication No. 63-146,029 and the like can be used.
[219] See also V.N.R.Pillai, Synthesis, (1), 1 (1980), A. Abab et al, Tetrahedron Lett., (47) 4555 (1971), D. H. R. Barton et al, J. Chem. Compounds which generate an acid by light described in Soc., (C), 329 (1970), US Pat. No. 3,779,778, EP 126,712 and the like can also be used.
[220] Among the compounds which are decomposed by irradiation of the above-mentioned usable electron beam or X-ray and generate an acid, those which are used particularly effectively will be described below.
[221] (1) S-triazine derivative represented by the oxazole derivative represented by the following general formula (PAG1) substituted with the trihalomethyl group, or general formula (PAG2).
[222]
[223] In the formula, R ²⁰¹ represents a substituted or unsubstituted aryl group, alkenyl group, and R ²⁰² represents a substituted or unsubstituted aryl group, alkenyl group, alkyl group, or -C (Y) ₃ . Y represents a chlorine atom or a bromine atom.
[224] Although the following compounds are specifically mentioned, It is not limited to these.
[225]
[226]
[227]
[228] The total content as the oxygen generating agent of (a) is usually 0.1 to 20% by weight, preferably 0.5 to 10% by weight, more preferably 1 to 1 with respect to the solid content of the entire composition of the positive electron beam or the X-ray resist composition of the present invention. 7% by weight.
[229] [II] acid-decomposable resins
[230] The resin (b1) or (b2) used in the present invention has a leaving group containing a residue of a compound having an Ip value smaller than the ionization potential (Ip) value of p-ethylphenol and an alkaline developer by the action of an acid. It is resin which the solubility to is increased.
[231] Here, the said Ip value means what was computed by the molecular orbital calculation by MOPAC. The molecular orbital calculation by MOPAC is based on the means disclosed in James J. P. Stewart, Journal of Computer-Aided Molecular Design Vol. 4, No. 1 (1990), pp. 1-105. This molecular orbital calculation can be performed by, for example, using Oxford Molecular's software, CAChe. Moreover, as a parameter used in this calculation, a PM3 parameter is preferable.
[232] The Ip value is preferably less than 8.9, more preferably 8.6 or less, and even more preferably 8.2 or less. The lower limit is not particularly limited, but is preferably 2 or more, more preferably 3 or more, further preferably Is 4 or more.
[233] In the present invention, the residue of the compound having an Ip value smaller than that of p-ethylphenol means a group excluding one hydrogen atom from the compound having the Ip value.
[234] Resin of this invention can hold the repeating unit represented by the said General formula (1) as a repeating unit holding the leaving group. In formula (I), R <^1> is a hydrogen atom or a methyl group, R <^2> , R <^3> is respectively independently a hydrogen atom or a C1-C4 alkyl group, W is a divalent organic group, X is an organic group, Ip of HOX The value is smaller than the Ip value of p-ethylphenol, n is an integer of 0-4, Preferably it is 1 or 2. When n is plural, plural W's may be the same or different.
[235] In addition, the leaving group in Formula (I) corresponds to the group from the carbon atom to X which R <^2> and R <^3> couple | bond in common.
[236] Examples of the divalent organic group of W include an alkylene group, a cycloalkylene group, an ether group, a thioether group, a carbonyl group, an ester group, an amide group, a sulfonamide group, a urethane group, and a single or two or more groups selected from the group consisting of urea groups. Represents a combination.
[237] Examples of the alkylene group include groups represented by the following formulas.
[238] [C (Rf) (Rg)] r-
[239] In said formula, Rf and Rg represent a hydrogen atom, an alkyl group, a substituted alkyl group, and an alkoxy group, and these may be same or different. As an alkyl group, lower alkyl groups, such as a methyl group, an ethyl group, a propyl group, isopropyl group, and a butyl group, are preferable, More preferably, they are selected from a methyl group, an ethyl group, a propyl group, and an isopropyl group. An alkoxy group etc. are mentioned as a substituent of a substituted alkyl group. As an alkoxy group, C1-C4, such as a methoxy group, an ethoxy group, a propoxy group, butoxy group, is mentioned. r is an integer of 1-10.
[240] Examples of the cycloalkylene group include those having 3 to 10 carbon atoms, and examples thereof include a cyclopentylene group, a cyclohexylene group, and a cyclooctylene group.
[241] Examples of the alkyl group having 1 to 4 carbon atoms as R ² and R ³ include methyl group, ethyl group, propyl group, n-butyl group, iso-butyl group, s-butyl group, t-butyl group and the like.
[242] Moreover, it is preferable that X in Formula (I) is a structure represented by Formula (II).
[243] -L-Y (II)
[244] In formula (II), L is a single bond or an alkylene group, Y is
[245]
[246] Group selected from Here, R <^4> represents a C1-C6 linear or branched alkyl group.
[247] Examples of the alkylene group as L include groups represented by the following formulas.
[248] [C (Rf) (Rg)] r-
[249] In said formula, Rf and Rg represent a hydrogen atom, an alkyl group, a substituted alkyl group, and alkoxy, and these may be same or different. As an alkyl group, C1-C4 alkyl groups, such as a methyl group, an ethyl group, a propyl group, isopropyl group, and a butyl group, are preferable, More preferably, they are selected from a methyl group, an ethyl group, a propyl group, and an isopropyl group. As a substituent of a substituted alkyl group, an alkoxy group (preferably C1-C4) is mentioned, As an alkoxy group, C1-C4 things, such as a methoxy group, an ethoxy group, a propoxy group, butoxy group, are mentioned. r is an integer of 1-10.
[250] The linear or branched alkyl group having 1 to 6 carbon atoms as R ⁴ includes a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, and the like, and may have a substituent. As a substituent, a halogen atom, an alkoxy group, an alkoxycarbonyl group, an acyl group, an acyloxy group, etc. are mentioned, Preferably it is C10 or less.
[251] As a monomer of the repeating unit which gives a leaving group of this invention, substituted styrene represented by p-hydroxy styrene, m-hydroxy styrene, vinyl benzoic acid, styrene sulfonic acid, etc., (meth) acrylic acid ester, (meth) acrylic acid amide, anhydrous Examples thereof include compounds having at least one addition polymerizable unsaturated bond selected from maleic acid, fumaric acid esters, maleimides, allyl compounds, vinyl ethers, vinyl esters, and the like.
[252] The polymer of (b1) or (b2) used in the present invention can be obtained by subjecting a part of the phenolic hydroxyl group of the trunk polymer having a phenolic hydroxyl group to acetalization using a corresponding vinyl ether compound and an acid catalyst. . For example, an acetal group can be introduced by the methods described in JP-A-5-249682, JP-A-8-123032, and JP-A-10-221854.
[253] Moreover, the polymer of (b1) or (b2) used by this invention is J. Photopolym. Sci. Desired acetal groups can be introduced using the acetal exchange reaction of S. Malik described in Tech., 11 (3) 431 (1998).
[254] That is, the polymer of (b1) or (b2) used in the present invention is an alkali-soluble polymer having a hydroxyl group, a vinyl ether compound represented by the general formula (C), and an alcohol compound represented by the general formula (D). It is preferable that it is resin obtained by making it react with an acid catalyst. Here, as alkali-soluble polymer which has a hydroxyl group, resin which has a phenolic hydroxyl group is preferable, More preferably, it is polyhydroxy styrene or a polyhydroxy styrene copolymer.
[255] Here, p-toluenesulfonic acid, p-toluenesulfonic acid pyridinium salt, etc. can be used as an acid catalyst.
[256] This method is, for example, by reacting a resin having a phenolic hydroxyl group with a vinyl ether compound represented by the general formula (C) and an alcohol compound represented by the general formula (D) in the presence of an acid catalyst, as shown in the following scheme. By this, a part of R ₃ and R ₄ or R ₄ can be introduced as an acetal group as represented by the following general formula (F).
[257]
[258] In the present invention, acetal exchange reaction that can be carried out using an alcohol available is preferred as a method of acetalization rather than synthesizing a reaction precursor (vinyl ether).
[259] Although the specific example of the repeating unit which has a leaving group used by this invention is listed below, it is not limited to these.
[260]
[261]
[262]
[263]
[264]
[265] The acid-decomposable resin in the present invention is a monomer of a repeating unit having a specific leaving group of the present invention, a monomer of a repeating unit having another leaving group (acid-decomposable group), or a monomer not having an acid-decomposable group, as necessary. It can synthesize | combine by superposing | polymerizing together with a.
[266] That is, the dry etching resistance, the standard developer aptitude, the substrate adhesion, the resist profile may also contain various repeating structural units for the purpose of adjusting the resolution, heat resistance, sensitivity, and the like, which are generally required properties of the resist.
[267] Although such a repeating structural unit corresponds to the following monomer as a repeating structural unit, It is not limited to these.
[268] Thereby, especially the performance calculated | required by acid-decomposable resin,
[269] (1) Solubility in Coating Solvents
[270] (2) Film forming property (glass transition point)
[271] (3) alkali developer
[272] (4) Membrane loss (selection of hydrophilic and alkali soluble groups)
[273] (5) Adhesion to Substrate of Unexposed Part
[274] (6) dry etching resistance
[275] Fine adjustment of the back and the like becomes possible.
[276] As such a monomer, for example, a compound having one addition polymerizable unsaturated bond selected from acrylic acid esters, methacrylic acid esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters and the like Etc. can be mentioned.
[277] Specifically, the following monomers are mentioned.
[278] Acrylic esters (preferably alkyl acrylate of 1-10 carbon atoms):
[279] Methyl acrylate, ethyl acrylate, propyl acrylate, amyl acrylate, cyclohexyl acrylate, ethyl hexyl acrylate, octyl acrylate, t-octyl acrylate, cloethyl acrylate, 2-hydroxyethyl acrylate 2, 2-dimethylhydroxypropyl acryl Latex, 5-hydroxypentyl acrylate, trimethylolpropane monoacrylate, pentaerythritol monoacrylate, benzyl acrylate, methoxybenzyl acrylate, furfuryl acrylate, tetrahydrofurfuryl acrylate and the like.
[280] Methacrylic acid esters (preferably alkyl acrylate having 1 to 10 carbon atoms in the alkyl group)
[281] Methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, amyl methacrylate, hexyl methacrylate, cyclohexyl methacrylate, benzyl methacrylate, clobenzyl methacrylate, octyl methacrylate Acrylate, 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate, 5-hydroxypentyl methacrylate, 2,2-dimethyl-3-hydroxypropyl methacrylate, trimethylolpropane monometha Methacrylate, pentaerythritol monomethacrylate, furfuryl methacrylate, tetrahydrofurfuryl methacrylate and the like.
[282] Acrylamides:
[283] Acrylamide and N-alkyl acrylamide (As alkyl group, C1-C10, for example, methyl group, ethyl group, propyl group, butyl group, t-butyl group, heptyl group, octyl group, cyclohexyl group, hydroxyethyl group, etc. NN-dialkylacrylamide (The alkyl group includes C1-C10, for example, methyl, ethyl, butyl, isobutyl, ethylhexyl, cyclohexyl, etc.), N-hydroxy Ethyl-N-methylacrylamide, N-2-acetamide ethyl-N-acetylacrylamide and the like.
[284] Methacrylamides:
[285] Methacrylamide, N-alkyl methacrylamide (as alkyl group having 1 to 10 carbon atoms, for example, methyl group, ethyl group, t-butyl group, ethylhexyl group, hydroxyethyl group, cyclohexyl group, etc.), N, N -Dialkyl methacrylamide (the alkyl group includes ethyl group, propyl group, butyl group and the like), N-hydroxyethyl-N-methylmethacrylamide and the like.
[286] Allyl Compounds:
[287] Allyl esters (for example, allyl acetate, allyl capronate, allyl caprylic acid, allyl laurate, allyl palmitate, allyl stearic acid, allyl benzoate, allyl acetic acid, allyl lactate, etc.), allyloxyethanol, and the like.
[288] Vinyl ethers:
[289] Alkyl vinyl ether (e.g., hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethyl hexyl vinyl ether, methoxy ethyl vinyl ether, ethoxy ethyl vinyl ether, chloroethyl vinyl ether, 1-methyl-2, 2-dimethylpropyl Vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl Ether etc.
[290] Vinyl esters:
[291] Vinyl butyrate, vinyl isobutyl acetate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valerate, vinyl caproate, vinyl chlor acetate, vinyl dichloro acetate, vinyl methoxy acetate, vinyl butoxy acetate, vinyl acetate acetate, vinyl Lactate, vinyl-β-phenylbutylate, vinylcyclohexylcarboxylate, etc.
[292] Itaconic acid dialkyls:
[293] Dimethyl itaconate, diethyl itaconate, dibutyl itaconate, and the like.
[294] Dialkyl esters or monoalkyl esters of fumaric acid; Dibutyl fumarate and the like.
[295] Others include crotonic acid, itaconic acid, acrylonitrile, methacrylonitrile and maleonitrile.
[296] In addition, as long as it is an addition-polymerizable unsaturated compound copolymerizable with the monomer corresponded to the said various repeating structural unit, you may copolymerize.
[297] In acid-decomposable resins, the molar ratio of each repeating structural unit is set appropriately to control dry etching resistance of resist, standard developer aptitude, substrate adhesion, resist profile, or resolution, heat resistance, sensitivity, etc. which are generally required for resist. do.
[298] The acid-decomposable resin in the present invention can be synthesized by known methods such as radical polymerization, cation polymerization and anion polymerization. Although it is most simple to perform radical polymerization by combining the corresponding monomer, it can synthesize | combine more preferably when a cation polymerization and an anion polymerization are used with a monomer. Moreover, when a monomer starts reaction other than superposition | polymerization by superposition | polymerization start type, the desired polymer can be obtained by polymerizing the monomer which introduce | transduced the suitable protecting group, and deprotecting after superposition | polymerization. The polymerization method is described in Experimental Chemistry Lecture 28 Polymer Synthesis, New Experimental Chemistry Lecture 19 Polymer Chemistry [I], and the like.
[299] Content of the monomer of the repeating unit which has the leaving group of this invention in acid-decomposable resin is 5-40 mol% normally with respect to all the repeating units, Preferably it is 10-25 mol%.
[300] The acid-decomposable resin of the present invention has a molecular weight of 3,000 to 1,000,000 or less. Preferably, the weight average molecular weight is 3,000 to 500,000 or less. More preferably, the weight average molecular weight is 3,000 to 100,000 or less.
[301] It is preferable that the molecular weight distribution (Mw / Mn) of the acid-decomposable resin which can be synthesize | combined by said synthesis method is 1.0-1.5, and it can especially make a resist highly sensitive by these. Moreover, resin of such molecular weight distribution can be synthesize | combined by using a living anion polymerization in the said synthesis | combining method.
[302] (b) resins (also called acid-decomposable resins or acid-decomposable polymers) whose solubility in alkaline developing solutions increases due to the action of an acid;
[303] An acid-decomposable polymer is a polymer which is decomposed by an acid generated from a photoacid generator by irradiation of actinic light or radiation and solubilized in an alkaline developer. An acid-decomposable polymer is a polymer protected by the group which decomposes | disassembles this alkali-soluble group by the action of an acid in the trunk polymer which has alkali-soluble group. As an alkali-soluble group, a phenolic hydroxyl group and a carboxyl group are preferable.
[304] As a protecting group of these alkali-soluble groups, an acetal group, a ketal group, t-butyl ester group, t-butoxycarbonyl group, etc. are preferable, an acetal group and a t-butyl ester group are more preferable, and an acetal group is especially sensitive and left to stand after exposure. It is preferable from the viewpoint of stability fluctuation with time and stability of the method fluctuation (PED).
[305] As the trunk polymer, hydroxystyrenes are preferable, and copolymers with acid-decomposable (meth) acrylates such as t-butyl acrylate or t-butyl methacrylate can be used. Moreover, a non-acid-decomposable group can be introduce | transduced in order to prepare the alkali solubility of trunk polymer. As a method of introducing a non-acid-decomposable group, a method by copolymerization such as styrenes, (meth) acrylic acid esters, or (meth) acrylic acid amides, or a method of protecting a hydroxyl group of hydroxystyrene with a non-acid-decomposable substituent is preferable. . As a substituent of a non-acid-decomposable group, an acetyl group, a mesyl group, a toluenesulfonyl group, etc. are preferable, but it is not limited to these.
[306] As an acid-decomposable polymer below, the polymer represented by general formula (G) is preferable.
[307]
[308] In formula (G), R <_3> represents a hydrogen atom or a methyl group, and each of some R < ₃ > may be same or different.
[309] R ₄ ″ is an alkyl group which may have a linear, branched or cyclic substituent of 1 to 12 carbon atoms, an aromatic group which may have 6 to 18 carbon atoms, or an aralkyl which may have a substituent of 7 to 18 carbon atoms. Group.
[310] R ₅ ″ represents a straight chain, branched alkyl group having 1 to 4 carbon atoms (eg, methyl group, ethyl group, propyl group, butyl group, sec-butyl group, t-butyl group), acetyl group, mesyl group, tosyl group, An acetyl group is more preferable.
[311] R ₆ ″ may have a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 8 carbon atoms, an aromatic group which may have 6 to 12 carbon atoms or an aromatic group having 7 to 18 carbon atoms. Good aralkyl group.
[312] R ₇ "and R ₈ " each independently represent a hydrogen atom, a linear, branched or cyclic C 1 to C 8 alkyl group, an C 6 to 12 substituent or an aromatic group or C 7 to C 7 The aralkyl group which may have 18 substituents is shown.
[313] Examples of the linear, branched or cyclic C1-C12 alkyl group for R ₄ ″ include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, t-butyl group, hexyl group, Alkyl groups, such as a 2-ethylhexyl group, an octyl group, a cyclopropyl group, a cyclopentyl group, a cyclohexyl group, and 1-adamantylethyl group, are mentioned.
[314] Examples of the linear, branched or cyclic C 1-8 alkyl group in R ₆ "to R ₈ " include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl and t-butyl groups. And alkyl groups such as hexyl group, 2-ethylhexyl group, octyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group and 1-adamantylethyl group.
[315] Examples of the aromatic group having 6 to 18 carbon atoms in R ₄ ″ include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring and the like.
[316] Examples of the aromatic group having 6 to 18 carbon atoms in R ₆ "to R ₈ " include benzene ring, naphthalene ring, anthracene ring, phenanthrene ring and the like.
[317] Examples of the aralkyl group having 7 to 18 carbon atoms in R ₄ ", R ₆ " to R ₈ "include a benzyl group, a phenethyl group, a benzhydryl group, a naphthylmethyl group and the like.
[318] These other substituents include cycloalkyl groups, aryloxy groups and alcohols which may contain halogen atoms such as hydroxyl groups, fluorine, chlorine, boron and iodine, amino groups, nitro groups, cyano groups, carbonyl groups, ester groups, alkoxy groups and heteroatoms. Substituents etc. which have a polyyl group are mentioned.
[319] Here, as the carbonyl group, an alkyl substituted carbonyl group and an aromatic substituted carbonyl group are preferable, as an ester group, an alkyl substituted ester group and an aromatic substituted ester group are preferable, and as an alkoxy group, a methoxy group, an ethoxy group, a propoxy group, t-butoxy group, etc. are preferable. Do.
[320] As a cycloalkyl group, a cyclohexyl group, an adamantyl group, a cyclopentyl group, a cyclopropyl group, etc. are mentioned, for example, The oxoranyl group etc. are mentioned as a thing containing a hetero atom.
[321] A phenoxy group etc. are mentioned as an aryloxy group, This aryl group may have a substituent.
[322] Examples of the substituent having a sulfonyl group include alkylsulfonyl groups such as methylsulfonyl group and ethylsulfonyl group, and arylsulfonyl such as phenylsulfonyl group.
[323] a, b, c, d and e each independently represent mol% of each monomer unit,
[324] 0 <a / (a + b) <0.6 is preferable and 0.05 <a / (a + b) <0.5 is more preferable. 0 <= c / (a + b + c) <0.3 is preferable, and 0 <= c / (a + b + c) <0.2 is more preferable. 0 <= d / (a + b + d) <0.4 is preferable, and 0 <= d / (a + b + d) <0.3 is more preferable. 0 <e / (a + b + e) <0.4 is preferable, and 0 <e / (a + b + e) <0.3 is more preferable.
[325] The preferable example of an acid-decomposable polymer is shown below. However, "i-Bu" represents an isobutyl group, "n-Bu" represents an n-butyl group, and "Et" represents an ethyl group.
[326]
[327]
[328]
[329]
[330] The weight average molecular weight of the polymer of (b) can be measured by gel permeation chromatography (GPC) as polystyrene reduced molecular weight (Mw), preferably 2,000 to 200,000, and 4,000 to 50,000 More preferably, 8,000-30,000 are especially preferable. When the molecular weight exceeds 200,000, the solubility is inferior and the resolution tends to decrease.
[331] Moreover, the polymer of said (b) can also be used in combination of 2 or more types.
[332] The polymer of (b) used by this invention can be obtained by carrying out acetalization reaction of a part of the phenolic hydroxyl group of the trunk polymer which has a phenolic hydroxyl group using the corresponding vinyl ether compound and an acidic catalyst.
[333] For example, an acetal group can be introduced by the methods described in JP-A-5-249682, JP-A-8-123032, and JP-A-10-221854.
[334] In addition, a desired acetal group can be introduced using the acetal exchange reaction of S. Malik described in J. Photopolym. Sci. Tech., 11 (3) 431 (1998).
[335] This method is carried out by reacting a resin having a phenolic hydroxyl group with a vinyl ether compound represented by the following general formula (C) and an alcohol compound represented by the following general formula (D) in the presence of an acid catalyst, as shown by the following reaction formula. A portion of _3x and R _4x , or R _4X can be introduced as an acetal group, as shown by the general formula (F ′) below.
[336]
[337] In said Formula (C ') or (D'), R <_3x> or R <_4x> respectively independently has a linear, branched or cyclic C1-C12 substituent, and has the C6-C18 substituent The aralkyl group which may have the aromatic group which may have, or the C7-C18 substituent is shown.
[338] Specific examples of the alkyl group, aromatic group, and aralkyl group in R _3x to R _4x include the examples described in R 4 ″ in General Formula (G).
[339] In this invention, as addition amount in the composition of the polymer of said (b), Preferably it is 40 to 99 weight% with respect to the total weight of solid content of a composition, More preferably, it is 60 to 97 weight%.
[340] In this invention, alkali-soluble resin which does not contain an acid-decomposable group in a positive resist composition can be used, and a sensitivity improves by this.
[341] Alkali-soluble resin (henceforth only alkali-soluble resin) which does not contain the said acid-decomposable group is resin soluble in alkali, A polyhydroxy styrene, a novolak resin, and derivatives thereof are mentioned preferably. Moreover, the copolymerization resin containing a p-hydroxy styrene unit can also be used if it is alkali-soluble.
[342] Among them, poly (p-hydroxy styrene), poly (p- / m-hydroxy styrene) copolymer, poly (po / -hydroxy styrene) copolymer, poly (p-hydroxy styrene / styrene) copolymer Is preferably used. In addition, poly (4-hydroxy-3-methyl styrene), poly (alkyl-substituted hydroxy styrene) resin in the form of poly (4-hydroxy-3, 5- dimethyl styrene), a part of the phenolic hydroxyl group of the resin Is alkylated or acetylated resin, it is preferably used if it is alkali-soluble.
[343] In this invention, as addition amount in the composition of alkali-soluble resin which does not contain the said acid-decomposable group, Preferably it is 2-60 weight% with respect to the total weight of solid content of a composition, More preferably, it is 5-30 weight%.
[344] (c) acetal compounds
[345] (C) component in this invention is a compound represented by general formula (A) and / or general formula (B).
[346] R ₁ ′ and R ₂ ′ each independently represent an organic group having 1 to 30 carbon atoms. As carbon number of this organic group, Preferably it is 2-20 pieces, More preferably, it is 4-16 pieces.
[347] As the organic group having 1 to 30 carbon atoms of R ₁ ′ and R ₂ ′, an alkyl group which may have a linear, branched or cyclic substituent, an aryl group which may have a substituent, or an aralkyl group which may have a substituent Listed.
[348] Examples of the linear, branched or cyclic alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, t-butyl group, hexyl group, 2-ethylhexyl group, octyl group and cyclo Examples of the alkyl group having 1 to 12 carbon atoms, such as a propyl group, a cyclopentyl group, a cyclohexyl group, and a 1-adamantylethyl group, are exemplified.
[349] As other substituents of these alkyl groups, cycloalkyl groups and aryloxy groups which may contain a halogen atom such as hydroxyl group, fluorine, chlorine, boron and iodine, amino group, nitro group, cyano group, carbonyl group, ester group, alkoxy group and hetero atom And substituents having a sulfonyl group. Here, as the carbonyl group, an alkyl substituted carbonyl group and an aromatic substituted carbonyl group are preferable, and as an ester group, an alkyl substituted ester group and an aromatic substituted ester group are preferable, and as an alkoxy group, a methoxy group, an ethoxy group, a propoxy group, t-butoxy group, etc. are preferable. Do. As a cycloalkyl group, a cyclohexyl group, an adamantyl group, a cyclopentyl group, a cyclopropyl group, etc. are mentioned, for example, The oxoranyl group etc. are mentioned as a thing containing a hetero atom. A phenoxy group etc. are mentioned as an aryloxy group, This aryl group may have a substituent. Substituents having a sulfonyl group include alkylsulfonyl groups such as methylsulfonyl group and ethylsulfonyl group, and arylsulfonyl groups such as phenylsulfonyl group.
[350] Examples of the aryl group include benzene, naphthalene, phenanthrene, anthracene, pyrene skeleton and the like as the skeleton of the aromatic ring, specifically, those having 6 to 30 carbon atoms are listed, and phenyl group, naphthyl group, phenanthrenyl group, anthracenyl group and the like are listed. do. In these aryl groups, what is described by the other substituent of an alkyl group can be hold | maintained as a substituent.
[351] Examples of the aralkyl group include benzene, naphthalene, phenanthrene, anthracene, pyrene skeleton and the like as the skeleton of the aromatic ring. Specific examples include those having 7 to 30 carbon atoms, such as benzyl group, phenethyl group, benzhydryl group and naphthylmethyl group. This is illustrated. In these aralkyl groups, what is described by the other substituent of an alkyl group can hold as a substituent.
[352] The organic group having 1 to 30 carbon atoms of R ₁ 'and R ₂ ' is preferably methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, t-butyl group, n- Pentyl group, n-hexyl group, cyclohexyl group, cyclohexylethyl group, phenyl group, phenylmethyl group, phenylethyl group, 3,4-dimethoxyphenyl group, 3,4,5-trimethoxyphenyl group, 3,4-dimethoxyphenyl Methyl group, 3,4,5-trimethoxyphenylmethyl group, 1-naphthyl group, 2-naphthyl group, 4-methoxy-1-naphthyl group, 2- (1-naphthyl) ethyl group, 9-anthrylmethyl group, 10-methoxy-1- anthryl group, 9-phenan styrene group, and 1-pyrenylmethyl group.
[353] As a method for synthesizing the acetal compound, the vinyl ether compound and the alcohol compound corresponding thereto can be dissolved in a suitable solvent and reacted in the presence of an acid catalyst. Here, p-toluenesulfonic acid, p-toluenesulfonic acid pyridinium salt, etc. can be used as an acid catalyst.
[354] The reaction is accompanied by an acetal exchange reaction and may be obtained as a mixture of a plurality of acetal compounds. The reaction can be suitably used for the purpose of the present invention even if it is a single element or a composite.
[355] As a vinyl ether compound and an alcohol compound, it can represent with the said general formula (C) and general formula (D), respectively. In the formula (C), the R ₃ '1 to 30 carbon atoms of the organic group as the following formula (A) or general formula (B) R ₁ of the' and R _2, the "carbon number of 1 to 30 of the same organic groups of Can be. Moreover, as W, X, n in general formula (D), it is the same as that demonstrated by resin of said (b1) or (b2).
[356] Hereinafter, the example of the (c) acetal compound used preferably for this invention is shown. In the following specific examples, Me represents a methyl group, t-Bu represents a t-butyl group, and iso-Bu represents an isobutyl group.
[357]
[358]
[359]
[360]
[361]
[362]
[363]
[364]
[365]
[366]
[367]
[368]
[369] It is preferable that the (c) acetal compound which is an essential component of this invention is 0.1 weight part or more and less than 100 weight part with respect to 100 weight part of solid content of the polymer of (b1) or (b2). More preferably, it is 1 weight part or more and less than 50 weight part, More preferably, it is 2 weight part or more and less than 30 weight part. When it exceeds 100 weight part, since the heat resistance of a resist will become the tendency to fall, it is not preferable, and below 0.1 weight part may not express the effect of this invention.
[370] [III] A low-molecular weight compound having a moiety that is stable against an acid and has residues of a compound in which the (c ') ionization potential (Ip) value is smaller than the Ip value of p-ethylphenol.
[371] The compound of (c ') used in the present invention is a low molecular compound that has a residue of a compound whose ionization potential (Ip) value is smaller than the Ip value of p-ethylphenol and is stable against acid.
[372] Here, the said Ip value means what was computed by the molecular orbital calculation by MOPAC. The molecular orbital calculation by MOPAC is based on the method disclosed by James J. P. Stewart, Journal of Computer-Aided Molecular Design Vol. 4, No. 1 (1990), pp. 1-105. This molecular orbital calculation can be performed by, for example, using Oxford Molecular's software, CAche. Moreover, PM3 parameter is preferable as a parameter used in this calculation.
[373] The Ip value is preferably less than 8.9, more preferably 8.6 or less, and still more preferably 8.2 or less. The lower limit is not particularly limited, but is preferably 2 or more, more preferably 3 or more, even more preferably 4 or more.
[374] In the present invention, the residue of a compound having an Ip value smaller than p-ethylphenol means a group in which one hydrogen atom is removed from the compound having the Ip value.
[375] The compound of (c ') of the present invention may be any low molecular compound which has a residue of a compound whose ionization potential (Ip) value is smaller than the Ip value of p-ethylphenol and is stable to acid. The compound represented by (E) is preferable.
[376] In said formula (E),
[377] X represents a group in which the ionization potential (Ip) value of H-X is smaller than the Ip value of p-ethylphenol.
[378] W represents a divalent organic group.
[379] Z is independently -OH, -OR ', -O-CO-R', -O-CO-OR ', -O-CO-NH-Ra, -O-CO-N (Ra) (Rb),- NH-CO-R ', -NH-CO-OR', -NH-SO ₂ -R ', -NRa-CO-R', -NRa-CO-OR ', -NRa-SO ₂ -R',- From the group CO-OR ', -CO-NH-Ra, -CO-NH-SO ₂ -R', -CO-NRa-SO ₂ -R ', -CO-N (Ra) (Rb), -CN It represents the group selected.
[380] R ', Ra, and Rb each independently represent an alkyl group having 1 to 10 carbon atoms or an aryl group which may have a substituent.
[381] n represents the integer of 1-3. When n is 2-4, some W may be same or different.
[382] Examples of the divalent organic group of W include an alkylene group, a cycloalkylene group, an ether group, a thioether group, a carbonyl group, an ester group, an amide group, a sulfonamide group, a urethane group, and a single or two or more groups selected from the group consisting of urea groups. Represents a combination.
[383] Examples of the alkylene group include groups represented by the following formulas.
[384] [C (Rf) (Rg)] r-
[385] In said formula, Rf and Rg represent a hydrogen atom, an alkyl group, a substituted alkyl group, and an alkoxy group, and these may be same or different. As an alkyl group, lower alkyl groups, such as a methyl group, an ethyl group, a propyl group, isopropyl group, and a butyl group, are preferable, More preferably, they are selected from a methyl group, an ethyl group, a propyl group, and an isopropyl group. An alkoxy group etc. are mentioned as a substituent of a substituted alkyl group. As an alkoxy group, C1-C4, such as a methoxy group, an ethoxy group, a propoxy group, butoxy group, is mentioned. r is an integer of 1-10.
[386] Examples of the cycloalkylene group include those having 3 to 10 carbon atoms, and examples thereof include a cyclopentylene group, a cyclohexylene group, and a cyclooctylene group.
[387] Examples of the alkyl group having 1 to 10 carbon atoms in R ', Ra, and Rb include methyl group, ethyl group, propyl group, n-butyl group, iso-butyl group, s-butyl group, t-butyl group, pentyl group, hexyl group and jade Til group etc. are mentioned.
[388] As an aryl group in R ', Ra, Rb, a phenyl group, a naphthyl group, etc. are mentioned. Moreover, the C6 or less lower alkyl group and the alkoxy group may be substituted by arbitrary positions of these aryl groups.
[389] As these other substituents, a cycloalkyl group, an aryl group, which may contain a halogen atom, such as hydroxyl group, fluorine, chlorine, boron, iodine, amino group, nitro group, cyano group, carbonyl group, ester group, alkoxy group, alkyl group and hetero atom The substituent which has an aryloxy group, a sulfonyl group, etc. are mentioned.
[390] Here, as the carbonyl group, an alkyl substituted carbonyl group and an aromatic substituted carbonyl group are preferable, and as an ester group, an alkyl substituted ester group and an aromatic substituted ester group are preferable, and as an alkoxy group, a methoxy group, an ethoxy group, a propoxy group, t-butoxy group, etc. are preferable. Do.
[391] As a cycloalkyl group, a cyclohexyl group, an adamantyl group, a cyclopentyl group, a cyclopropyl group, etc. are mentioned, for example, The oxoranyl group etc. are mentioned as a thing containing a hetero atom.
[392] A phenoxy group etc. are mentioned as an aryloxy group, This aryl group may have a substituent.
[393] Examples of the substituent having a sulfonyl group include alkylsulfonyl groups such as methylsulfonyl group and ethylsulfonyl group, and arylsulfonyl groups such as phenylsulfonyl group.
[394] Moreover, it is preferable that X in Formula (I) is group chosen from said Formula (A)-(E).
[395] In said formula (A)-(E),
[396] R <^4> represents a C1-C6 linear or branched alkyl group. n1 is an integer of 0-3, n2 is an integer of 0-7, n3 is an integer of 0-9, n4 is an integer of 0-9, n5 represents an integer of 0-9.
[397] The linear or branched alkyl group having 1 to 6 carbon atoms as R ⁴ includes a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, and the like, and may have a substituent. As a substituent, a halogen atom, an alkoxy group, an alkoxycarbonyl group, an acyl group, an acyloxy group, etc. are mentioned, Preferably it is C10 or less.
[398] Although the specific example of the compound of (c ') used by this invention is given to the following, it is not limited to these.
[399]
[400]
[401]
[402] These compounds of (c ') can be used individually or in combination of 2 or more types. As for the usage-amount of the compound of (c '), 0.1 weight part or more and less than 100 weight part are preferable with respect to 100 weight part of resin solid content of (b) of this invention, More preferably, it is 1 weight part or more and less than 50 weight part, More preferably, they are 2 weight part or more and less than 30 weight part. If it is less than 0.1 weight part, the effect of the addition cannot be acquired.
[403] [III] (d) Solvent
[404] The composition of this invention contains a solvent from the point which melt | dissolves in the solvent which melt | dissolves each said component, and apply | coats on a support body. Here, as a solvent used, ethylene dichloride, cyclohexanone, cyclopentanone, 2-heptanone, (gamma) -butyrolactone, methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl Acetate, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether propionate. Toluene, ethyl acetate, methyl lactate, ethyl lactate, methyl methoxypropionate, ethyl ethoxypropionate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, N, N-dimethylformamide, dimethyl sulfoxide, N- Methylpyrrolidone, tetrahydrofuran, etc. are preferable and these solvents can be used individually or in mixture.
[405] In the present invention, as the solvent, propylene glycol monomethyl ether acetate is particularly preferable, and in these, the in-plane uniformity is excellent.
[406] It dissolves in a solvent so that the density | concentration of solid content (it may also contain other additives etc. which are demonstrated below) of the composition of this invention will be 0.5-20 weight% normally, Preferably it is 3-15 weight%.
[407] [IV] organobasic compounds
[408] The organic basic compound used in the present invention is a compound which is stronger in basicity than phenol. Among these, nitrogen-containing basic compounds are preferable.
[409] In particular, the nitrogen-containing basic compound containing the structure represented by following formula (A)-(E) is preferable.
[410]
[411] Here, R ²⁵⁰ , R ²⁵¹ and R ²⁵² are the same or different and represent a hydrogen atom, an alkyl group of 1 to 6 carbon atoms, an aminoalkyl group of 1 to 6 carbon atoms, a hydroxyalkyl group of 1 to 6 carbon atoms, or a substitution of 6 to 20 carbon atoms, or It is an unsubstituted aryl group, where R ²⁵¹ and R ²⁵² may combine with each other to form a ring.
[412]
[413] ( ^Wherein , R ²⁵³ , R ²⁵⁴ , R ²⁵⁵ and R ²⁵⁶ are the same or different and represent an alkyl group having 1 to 6 carbon atoms.)
[414] Further preferred compounds are nitrogen-containing basic compounds having at least two nitrogen atoms of different chemical environments in one molecule, and particularly preferably those containing both substituted or unsubstituted amino groups and ring structures containing nitrogen atoms. Or a compound having an alkylamino group. Preferred embodiments include substituted or unsubstituted guanidine, substituted or unsubstituted aminopyridine, substituted or unsubstituted aminoalkylpyridine, substituted or unsubstituted aminopyrrolidine, substituted or unsubstituted indazole, substituted or unsubstituted Pyrazole, substituted or unsubstituted pyrazine, substituted or unsubstituted pyrimidine, substituted or unsubstituted purine, substituted or unsubstituted imidazoline, substituted or unsubstituted pyrazoline, substituted or unsubstituted piperazine , Substituted or unsubstituted aminomorpholine, substituted or unsubstituted aminoalkylmorpholine, and the like. Preferred substituents are amino group, aminoalkyl group, alkylamino group, aminoaryl group, arylamino group, alkyl group, alkoxy group, acyl group, acyloxy group, aryl group, acyloxy group, nitro group, hydroxyl group and cyano group.
[415] Particularly preferred compounds are guanidine, 1,1-dimethylguanidine, 1,1,3,3-tetramethylguanidine, imidazole, 2-methylimidazole, 4-methylimidazole, N-methylimidazole, 2-phenylimidazole, 4,5-diphenylimidazole, 2,4,5-triphenylimidazole, 2-aminopyridine, 3-aminopyridine, 4-aminopyridine, 2-dimethylaminopyridine, 4-dimethylaminopyridine, 2-diethylaminopyridine, 2- (aminomethyl) pyridine, 2-amino-3-methylpyridine, 2-amino-4-methylpyridine, 2-amino-5-methylpyridine, 2- Amino-6-methylpyridine, 3-aminoethylpyridine, 4-aminoethylpyridine, 3-aminopyrrolidine, piperazine, N- (2-aminoethyl) piperazine, N- (2-aminoethyl) piperi Dine, 4-amino-2,2,6,6-tetramethylpiperidine, 4-piperidinopiperidine, 2-iminopiperidine, 1- (2-aminoethyl) pyrrolidine, pyrazole , 3-amino-5-methylpyrazole, 5-amino-3-methyl-1-p-tolylpyrazole, pyrazine, 2- (ami Methyl) -5-methylpyrazine, pyrimidine, 2,4-diaminopyrimidine, 4,6-dihydroxypyrimidine, 2-pyrazoline, 3-pyrazoline, N-aminomorpholine, N- (2 -Aminoethyl) morpholin, diazabicyclononene, diazabicyclo undecene, etc. are mentioned, It is not limited to these.
[416] These organic basic compounds can be used individually or in combination of 2 or more types. The usage-amount of an organic basic compound is 0.01-10 mol% normally, Preferably it is 0.1-5 mol% with respect to the compound which produces | generates an acid by irradiation of (a) electron beam or X-ray of this invention. If it is less than 0.01 mol%, the effect of the addition cannot be obtained. On the other hand, when it exceeds 10 mol%, there is a tendency that a decrease in sensitivity and developability of a non-exposed part deteriorate.
[417] [V] fluorine-based and / or silicone-based surfactants
[418] The surfactant that can be used in the positive photoresist composition of the present invention is preferably a fluorine-based and / or silicon-based surfactant, and includes any of a fluorine-based surfactant, a silicone-based surfactant, and a surfactant containing both of fluorine and silicon atoms. It may contain two or more kinds.
[419] As these surfactants, for example, Japanese Patent Laid-Open No. 62-36663, Japanese Patent Laid-Open No. 61-226746, Japanese Patent Laid-Open No. 61-226745, Japanese Patent Laid-Open No. 62-170950, Japanese Patent Laid-Open No. 63-34540 Japanese Patent Laid-Open No. 7-230165, Japanese Patent Laid-Open No. 8-62834, Japanese Patent Laid-Open No. 9-54432, Japanese Patent Laid-Open No. 9-5988, US Patent 545720, US Patent 5360692, US Patent Surfactants described in 5529881, US Patent 5296330, US Patent 5436098, US Patent 576143, US Patent 5294511, US Patent 5824451, and the following commercially available surfactants can also be used as they are.
[420] As a commercially available surfactant which can be used, for example, F-Top EF301, EF303 (made by Shin-Akigasei Co., Ltd.), Floroid FC430, 431 (made by Sumitomo 3M Co., Ltd.), megafac F171, F173 , F176, F179, F189, R08 (manufactured by Dainippon Ink, Inc.), Cypron S-366, SC101, 102, 103, 104, 105, 106 (manufactured by Asahi Glass Co., Ltd.), Troisol S-366 ( Fluorine-type surfactant or silicone surfactant, such as Troy Chemical Co., Ltd. product) is mentioned. Polysiloxane polymer-KP-341 (manufactured by Shin-Hetsu Kogyo Co., Ltd.) can also be used as a silicone surfactant.
[421] Surfactants other than a fluorine type and / or silicone type surfactant can be used together. Specifically, polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenol ether, polyoxyethylene nonyl phenol Polyoxyethylene alkylallyl ethers such as ether, polyoxyethylene polyoxypropylene block copolymers, sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan tree Sorbitan fatty acid esters such as oleate and sorbitan tristearate, polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate Poly, such as Eight and polyoxyethylene sorbitan tristearate Nonionic surfactants such as ethylene sorbitan fatty acid esters, acrylic acid or methacrylic acid-based (poly) polymerized polypro-Nos. 75, No. 95 (manufactured by Kyoisha Yuji Chemical Co., Ltd.); Can be.
[422] The compounding quantity of these surfactant is 2 weight% or less normally with respect to solid content of the whole composition in the composition of this invention, Preferably it is 1 weight% or less.
[423] These surfactants may be added alone, or may be added in combination of two or more thereof.
[424] In order to pursue other advances in semiconductors, in addition to the performance of inherent high resolution of resists, high-performance compositions have been developed in various aspects such as sensitivity, coating property, minimum coating amount, substrate adhesion, heat resistance, and storage stability of the composition. It is necessary.
[425] In recent years, in order to increase the absolute quantity computed of a completed chip, there exists a tendency to make a device using a large diameter wafer.
[426] However, since application | coating to a large diameter is concerned about the fall of applicability | paintability, especially the in-plane film thickness uniformity, improvement of the film thickness in-plane uniformity is calculated | required with respect to the large diameter wafer. As a means of confirming the uniformity, the film thickness measurement is performed at many points in the wafer, the standard deviation of each measured value is obtained, and the uniformity can be confirmed by three times the value. The smaller this value, the higher the in-plane uniformity. The value is preferably 100 or less, more preferably 50 or less, which is three times the standard deviation.
[427] Moreover, CD linearity is most important also in manufacture of the mask for photolithography, and the improvement of the in-plane uniformity of the film thickness in a blank is calculated | required.
[428] The resist composition of the present invention can be filtered after being dissolved in a solvent. Therefore, the filter to be used is selected from those used in the field of resist, and specifically, the material of the filter containing polyethylene, nylon, or polysulfone is used.
[429] More specifically, Mirpoasha's MicroGuard, MicroGuard Plus, Microguard Minichem-D, Microguard Minichem-D PR, Mirpoa Ortimeza-DEV / DEV-C, Myripoa Ortimeza 16/14, Holsha's Urutiboa N66, Pozidine nylon Falcon, etc. are mentioned. Moreover, about the diameter of a filter, the thing confirmed by the following method can be used. Eventually, the PSL standard particles (polystyrene latex bead particle diameter 0.100㎛) were dispersed in ultrapure water, and the tube pump was continuously flowed in rectified amount to the filter primary value, and the target concentration was measured by the particle counter and corrected by 90% or more. Can be used as an aperture 0.1 μm filter.
[430] Spinners and coaters on the substrate (e.g. silicon / silicon dioxide coating) or the substrate for manufacturing photolithography mask (e.g. glass / Cr coating) for use in the fabrication of precision integrated circuit devices. After application by a suitable coating method such as the like, a good resist pattern can be obtained by exposing through a predetermined mask, baking and developing.
[431] As a developing solution of the composition of the present invention, inorganic alkalis such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate and aqueous ammonia, first amines such as ethylamine and n-propylamine, diethylamine and di-n- Second amines such as butylamine, third amines such as triethylamine and methyldiethylamine, alcohol amines such as dimethylethanolamine and triethanolamine, fourth such as tetramethylammonium hydroxide and tetraethylammonium hydroxide Alkaline aqueous solutions, such as cyclic amines, such as a quaternary ammonium salt, a pyrrole, and piperidine, can be used.
[432] Moreover, alcohol and surfactant can be added to the alkaline aqueous solution in an appropriate amount.
[433] (Example)
[434] Hereinafter, although an Example demonstrates this invention still in detail, the content of this invention is not limited by these.
[435] 1. Synthesis Example of Constituent Material
[436] (1) a compound that generates an acid by electron beam or X-ray
[437] (1-1) Synthesis of pentafluorobenzenesulfonate tetramethylammonium salt
[438] 25 g of pentafluorobenzenesulfonyl chloride was dissolved in 100 ml of methanol under ice cooling, and 100 g of 25% tetramethylammonium hydroxide aqueous solution was slowly added thereto. After stirring for 3 hours at room temperature, a solution of pentafluorobenzenesulfonic acid tetramethylammonium salt was obtained. This solution was used for salt exchange of sulfonium salt and iodonium salt.
[439] (1-2) Synthesis of triphenylsulfonium pentafluorobenzenesulfonate
[440] 50 g of diphenyl sulfoxide was dissolved in 800 ml of benzene, and 200 g of aluminum chloride was added thereto, and the mixture was refluxed for 24 hours. The reaction solution was slowly poured into 2 L of ice, and 400 ml of concentrated hydrochloric acid was added thereto, followed by heating at 70 ° C for 10 minutes. This aqueous solution was washed with 500 ml of ethyl acetate, and after filtering, 200 g of ammonium iodide dissolved in 400 ml of water was added. The precipitated powder was collected by filtration, washed with water, washed with ethyl acetate and dried to obtain 70 g of triphenylsulfonium iodide.
[441] 30.5 g of triphenylsulfonium iodide was dissolved in 1000 ml of methanol, 19.1 g of silver oxide was added to this solution, and the mixture was stirred at room temperature for 4 hours. The solution was filtered and an excess solution of pentafluorobenzenesulfonate tetramethylammonium salt was added thereto. The reaction solution was concentrated and dissolved in 500 ml of dichloromethane, and the solution was washed with 5% tetramethylammonium hydroxide aqueous solution and water. The organic phase was dried over anhydrous sodium sulfate, and then concentrated to give triphenylsulfonium pentafluorobenzenesulfonate (I-1).
[442] Synthesis of (1-3) di (4-t-amylphenyl) iodonium pentafluorobenzenesulfonate
[443] 60 g of t-amyl benzene, 39.5 g of potassium iodide, 81 g of acetic anhydride, and 170 ml of dichloromethane were mixed, and 66.8 g of concentrated sulfuric acid was slowly added dropwise thereto under ice cooling. After 2 hours of stirring under ice cooling, the mixture was stirred at room temperature for 10 hours. 500 ml of water was added to the reaction liquid under ice cooling, and this was extracted with dichloromethane, and the organic phase was washed with sodium bicarbonate and water, and then concentrated to give di (4-t-amylphenyl) iodium sulfate. This sulfate was added to the solution of excess pentafluorobenzenesulfonic acid tetramethylammonium salt. 500 ml of water was added to the solution, which was extracted with dichloromethane, the organic phase was washed with 5% aqueous tetramethylammonium hydroxide solution and water, and then concentrated to give di (4-t-amylphenyl) iodiumpentafluoro Robenzenesulfonate (III-1) was obtained.
[444] Other acid generators can also be synthesized using the same method as described above.
[445] (2) Synthesis of resin
[446] Synthesis Example 1 Synthesis of Vinyl Ether 1
[447] 25 g of 4-methoxy-1-naphthol and 22.9 g of chloroethyl vinyl ether were dissolved in 140 ml of DMAc, 6.90 g of NaOH was added, and the mixture was stirred at 120 ° C for 2 hours. Thereafter, the NaCl salt was filtered, ethyl acetate and water were added, and the mixture was separated. Thereafter, ethyl acetate was removed from the organic layer, and recrystallization was carried out with methanol to obtain vinyl ether 1 in a yield of 84%.
[448] Synthesis Examples 2 to 14 Synthesis of Vinyl Ethers 2 to 14
[449] The reaction was carried out in the same manner as in Synthesis example 1 except for changing the alcohol to be added, and vinyl ether 2 to 14 were obtained by silica gel column chromatography or methanol recrystallization.
[450] Synthesis Example 15 Synthesis of Vinyl Ether 15
[451] In a dry flask, 25 g of 9-hydroxymethylanthracene was dissolved in 100 ml of anhydrous THF, and cooled to 0 ° C. under a stream of nitrogen. 3.17 g of sodium hydride was added and stirred once. Thereafter, 19.2 g of chloroethyl vinyl ether as it was at 0 ° C was added dropwise, followed by stirring at room temperature for 2 hours after the lowering type. After adding saturated aqueous ammonium chloride solution, ethyl acetate and water were added and liquid-separated. Thereafter, the solvent was removed from the organic layer and purified by silica gel column chromatography to obtain vinyl ether 15 in a yield of 88%.
[452]
[453]
[454]
[455] Synthesis Example 16 Synthesis of Resin 1
[456] 50 g of poly (p-hydroxystyrene) (VP-8000) manufactured by Nippon Soutachi Co., Ltd. was dissolved in 200 g of anhydrous THF, 15.25 g of vinyl ether 1 was added, and 80 mg of p-toluenesulfonic acid were added at room temperature. Stirred for time. The reaction solution was added dropwise with vigorous stirring in ultrapure water 5L and reprecipitation was performed. Obtained resin was dried at 70 degreeC in the vacuum dryer for 12 hours, and resin 1 was obtained. The weight-average molecular weight of VP-8000 was 9800 using GPC measured polystyrene as a standard sample.
[457] (Synthesis Examples 17-30)
[458] The reaction was carried out in the same manner as in Synthesis example 16 except for changing the added vinyl ether, to obtain resins 2 to 15.
[459] Resin synthesize | combined above is shown below.
[460]
[461]
[462]
[463]
[464] Synthesis Example 31
[465] 70 g of poly (p-hydroxystyrene) Nippon Soitachi Co., Ltd. (molecular weight: 8,000) was dissolved in 320 g of propylene glycol methyl ether acetate (PGMEA), and 0.35 g of p-toluenesulfonic acid pyridinium salt was further added to 60 ° C. It was dissolved by heating at. The mixture was decompressed to 60 mmHg at 20 mmHg to remove about 40 g of the solvent with water remaining in the system. After cooling to 20 ° C, 44.1 g of alcohol (1) having the following structure was added and dissolved. 17.5 g of this solution tert-butyl vinyl ether were added, and stirring was continued at 20 degreeC for 5 hours. 280 ml of ethyl acetate was added to the reaction mixture, and 140 ml of water and 12 ml of acetone were further added to carry out the extraction operation. After the washing operation was repeated three times, removal was performed at 60 ° C. and 20 mm Hg to remove moisture in the system.
[466] Furthermore, the obtained resin solution was diluted with acetone and precipitated with a large amount of hexane to obtain a white resin.
[467] This operation was repeated 3 times, and the obtained resin was heated by 40 degreeC and a vacuum dryer for 24 hours, and it dried, and obtained [Resin 16] of the structure shown below. The weight average molecular weight was 8,400.
[468] Synthesis Example 32-Synthesis Example 39
[469] Reactions were performed similarly to the synthesis example 31 except having changed the added alcohol into alcohol (2)-(8) of the following structure, and resin 17-23 was obtained.
[470]
[471]
[472]
[473] The Ip value of HO-X reaction part in Formula (I) which the said resin holds is as follows. Calculations were made using MOPAC (PM3 parameters) from Oxford Molecular, software CAChe 4.1.1. (Unit: eV)
[474] Resin 1: 8.237
[475] Resin 2: 8.717
[476] Resin 3: 8.783
[477] Resin 4: 8.505
[478] Resin 5: 8.543
[479] Resin 6: 8.469
[480] Resin 7: 8.293
[481] Resin 8: 8.722
[482] Resin 9: 8.715
[483] Resin 10: 8.477
[484] Resin 11: 7.698
[485] Resin 12: 8.029
[486] Resin 13: 8.500
[487] Resin 14: 8.109
[488] Resin 15: 8.015
[489] Resin 16: 8.588
[490] Resin 17: 8.608
[491] Resin 18: 8.739
[492] Resin 19: 8.413
[493] Resin 20: 8.746
[494] Resin 21: 8.109
[495] Resin 22: 8.851
[496] Resin 23: 8.182
[497] Comparative Resin 24: 10.890 (Compound ethanol to be calculated)
[498] Moreover, the ratio and weight average molecular weight of the repeating unit which hold the leaving group of each resin are shown below.
[499] Table 1
[500] SuzyPercentage of repeat units with leaving group (mol%)Weight average molecular weight Resin 114.89800 Resin 214.29800 Resin 313.39700 Resin 414.59800 Resin 513.19600 Resin 614.29700 Resin 714.79400 Resin 814.49700 Resin 913.49500 Resin 1014.29800 Resin 1113.19600 Resin 1213.89400 Resin 1313.59200 Resin 1413.29700 Resin 1513.49900 Resin 1616.79800 Resin 1716.29800 Resin 1815.39800 Resin 1915.09700 Resin 2015.69800 Resin 2116.19700 Resin 2215.99700 Resin 2315.79700 Comparative resin14.69500
[501] Synthesis Example 40
[502] 54.1 g of benzyl alcohol and 0.4 g of p-toluenesulfonic acid were dissolved in 230 g of PGMEA, and the mixture was removed under reduced pressure at 60 DEG C at 20 mmHg to remove water in the system. The oil was about 18 g. After cooling to 20 ° C., 50.1 g of tert-butyl vinyl ether was added, followed by stirring for 1 hour. 0.4 g of triethylamine was added to the reaction mixture, followed by stirring. 200 ml of ethyl acetate was added thereto, followed by washing with 100 ml of water. After repeating this washing process three times, ethyl acetate was removed under reduced pressure to obtain an acetal compound A-1 and A-2 mixture. This mixture was separated by silica gel column chromatography.
[503]
[504] Synthesis Example 41
[505] The acetal compounds A-3 to A-12 were obtained by the method similar to the synthesis example 40 using the alcohol compound shown below instead of benzyl alcohol.
[506] Table 2
[507]
[508]
[509] 2. Examples [Examples 1 to 23 and Comparative Examples 1 and 2]
[510] (1) resist drawing
[511] Resin 1 (12 g), acid generator (I-1) (0.11 g) nitrogen-containing basic compound B-1 (0.0065 g), surfactant W-1 (0.0022 g), acetal compound (A-9) (Table 3 (The amount of addition described) was dissolved in 19.5 g of propylene glycol monomethyl ether acetate, and this was filtered through a 0.1 µm Teflon filter to prepare a resist solution of Example 1.
[512] Similarly, as shown in Table 3, the kind of each component was changed and the resist solution of Examples 2-23 and Comparative Examples 1 and 2 was prepared.
[513] Each sample solution was applied onto a silicon wafer using a spin coater, dried at 120 ° C. for 90 seconds in a vacuum suction hot plate to obtain a resist film having a thickness of 0.5 μm.
[514] (2) Preparation of resist pattern
[515] The resist film was irradiated with an electron beam lithography apparatus (pressurized voltage 50 KV).
[516] After irradiation, heating was carried out (60 seconds at 110 ° C.) on a vacuum adsorption hot plate, respectively, immersed for 60 seconds in a 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution, and rinsed with water for 30 seconds to dry.
[517] The cross-sectional shape of the obtained contact hole pattern and the line and space pattern was observed with a scanning electron microscope.
[518] (3) evaluation of sensitivity and resolution
[519] Sensitivity was made into the minimum irradiation amount at the time of resolving a 0.20 micrometer line (line: space = 1: 1), and the limit resolution (the separate resolution of a line and space) in the irradiation amount was made into the resolution. When the 0.20 µm line (line: space = 1: 1) was not resolved, the limit resolution was regarded as resolution, and the irradiation dose at that time was regarded as sensitivity.
[520] Evaluation of Line Width at Pattern Top and Bottom
[521] The line width of the 0.2 μm line (line: space = 1: 1) was observed from the top and the bottom with a scanning electron microscope, and evaluated by the difference between the line widths of the top and the bottom. As for (line: space = 1: 1) not being resolved, the line width at the limit resolution was evaluated.
[522] (Double-circle): The difference of the line width of a top part and a bottom part is less than 3% (% of a line width of a bottom part).
[523] ○: difference between the line width of the top and bottom is less than 5% (% of the line width of the bottom)
[524] X: The difference of the line width of a top part and a bottom part is 5% or more (% of the line width of a bottom part)
[525] Table 3
[526]
[527] * Addition amount "wt%" of acetal compound is% by weight when resin addition amount (12 g) is 100
[528] The symbol used in Table 3 shows the following content.
[529] The organic basic compound is as follows.
[530] B-1: 2,4,5-triphenylimidazole
[531] B-2: 1,5-diazabicyclo [4.3.0] nona-5-ene
[532] B-3: 4-dimethylaminopyridine
[533] B-4: 1,8-diazabicyclo [5.4.0] undeca-7-ene
[534] B-5: N-cyclohexyl-N'-morpholinoethylthiourea
[535] Regarding surfactant, it is as follows.
[536] W-1: Troisol S-366 (Troy Chemical Co., Ltd. product)
[537] W-2: Mega Pack F176 (Dainippon Ink Co., Ltd. product)
[538] W-3: Mega Pack R08 (Dainippon Ink Co., Ltd. product)
[539] W-4: Polysiloxane Polymer KR-341 (Shinhetsu Kogyo Co., Ltd. product)
[540] W-5: Cypress S-382 (Asahi Glass Co., Ltd. product)
[541] Table 4
[542] Sensitivity (μC / ㎠)Resolution (μm)Top / bottom line gap Example 10.50.04◎ Example 20.50.04◎ Example 30.70.05◎ Example 40.80.04◎ Example 50.70.05◎ Example 60.80.04◎ Example 70.90.05◎ Example 80.60.05◎ Example 90.70.04◎ Example 100.90.04◎ Example 111.00.04◎ Example 120.60.04◎ Example 130.50.05◎ Example 140.50.04◎ Example 150.60.04◎ Example 161.00.06○ Example 171.10.06○ Example 181.20.05○ Example 191.30.05○ Example 201.10.06◎ Example 211.60.06◎ Example 221.70.06◎ Example 231.90.07○ Comparative Example 14.50.12○ Comparative Example 21.00.05×
[543] From the results in Table 4, it is found that the positive resist composition of the present invention is high sensitivity and high resolution, and the obtained pattern profile is good.
[544] In Examples 1 to 23, the solvent was changed to propylene glycol monomethyl ether acetate / propylene glycol monomethyl ether = 80/20 (weight ratio). The same results were obtained.
[545] (4) Patterning by the same magnification X-ray exposure
[546] Using the resist compositions of Examples 1 and 20 and Comparative Examples 1 and 2, respectively, a resist film having a film thickness of 0.40 탆 was obtained in the same manner as in (1) above. Next, patterning was carried out in the same manner as in (2) except that the same magnification X-ray exposure apparatus (gap value) 20 was used, and the resist performance was evaluated in the same manner as in (3). Table 5 shows the results of the evaluation.
[547] Table 5
[548] Resist compositionSensitivity (mJ / ㎠)Resolution (μm)Top / bottom line gap Example 1400.09◎ Example 20350.10◎ Comparative Example 11300.16○ Comparative Example 2700.12×
[549] As shown in Table 5, the resist composition of the present invention was found to exhibit extremely excellent performance even in X-ray exposure.
[550] 1. Synthesis Example of Constituent Material
[551] (1) a compound that generates an acid by electron beam or X-ray
[552] (1-1) Synthesis of Disulfone Derivative (I "-2)
[553] 20 g of p-toluenesulfonylhydrazide was dissolved in 100 ml of pyridine, and 20.5 g of p-toluenesulfonyl chloride was slowly added thereto while cooling. After vigorous stirring, the powder precipitated. This was filtered off, washed with water and dried to obtain 35 g of 1,2-bis (p-toluenesulfonyl) hydrazine. This was gradually added to 150 ml of concentrated nitric acid heated at 40 ° C, and the reaction proceeded while foaming. After the addition, the mixture was stirred at room temperature for 1 hour and then poured into 600 ml of distilled water.
[554] The precipitated powder was collected by filtration and washed with distilled water until the washings became neutral. This was recrystallized from toluene and 8.7g of disulfone derivatives (I-2) were obtained.
[555] Other compounds can also be synthesized by using the same method.
[556] (I-2) Synthesis of Imidosulfonate Derivative (II "-2)
[557] To a solution of 16.31 g of N-hydroxyphthalimide, 15.18 g of triethylamine, and 350 ml of tetrahydrofuran, 19.07 g of p-toluenesulfonic acid chloride was added dropwise over 30 minutes, followed by stirring at room temperature for 3 hours. After that, the reaction solution was filtered, the filtrate was separated with 400 ml of ethyl acetate / 200 ml of water, an organic layer was collected, the solvent was removed, and the residue was purified by silica gel chromatography to obtain 2.87 g of imidesulfonate derivative (II "-2).
[558] 2. Examples [Examples 24 to 46 and Comparative Examples 3 to 4]
[559] (1) resist drawing
[560] Resin 1 (2 g), acid generator I "-2 (0.1 g), acid generator (I-7) (0.02 g), nitrogen-containing basic compound B-1 (0.0065 g), surfactant W-1 (0.0022) g) was dissolved in 21.5 g of propylene glycol monomethyl ether acetate, which was filtered through a 0.1 µm Teflon filter to prepare a resist solution of Example 16.
[561] Similarly, as shown in Table 1, the kind of each component was changed and the resist solution of Examples 24-46 and Comparative Examples 3-4 was prepared.
[562] Each sample solution was applied onto a silicon wafer using a spin coater, dried at 120 ° C. for 90 seconds in a vacuum suction hot plate to obtain a resist film having a thickness of 0.5 μm.
[563] (2) Preparation of resist pattern
[564] The resist film was irradiated with an electron beam lithography apparatus (pressurized voltage 50 KV).
[565] After irradiation, heating was carried out in a vacuum adsorption hot plate (60 seconds at 110 ° C.), immersed in an aqueous 2.38% tetramethylammonium hydroxide (TMAH) solution for 60 seconds, rinsed with water for 30 seconds and dried.
[566] (3) Evaluation of sensitivity, resolution and edge roughness
[567] With respect to these, sensitivity, resolution, and edge roughness were evaluated as follows.
[568] Table 2 shows the results of these evaluations.
[569] [Sensitivity and resolution]
[570] The sensitivity was made into the sensitivity when the 0.20 micrometer line (line: space = 1: 1) was resolved, and the limit resolution (the separate resolution of the line and space) in the irradiation amount was made into resolution. In the case where the 0.2 µm line (line: space = 1: 1) was not resolved, the limit resolution was regarded as resolution, and the irradiation dose at that time was regarded as sensitivity.
[571] [Edge illumination]
[572] The edge of the longitudinal direction of the 0.20 µm line pattern obtained from the dose of reproducing the 0.2 µm line pattern was 5 µm in the longitudinal direction using a side scanning type electron microscope S-8840 (manufactured by Hitachi Seisakusho Co., Ltd.). The distance from the baseline to be measured was 50 points, the standard deviation was obtained, and the variance (3σ) was used as an index of edge roughness. The smaller this value is, the more preferable.
[573] Table 6
[574]
[575] In Table 6, the symbol used shows the following content.
[576] The acid generator is as follows.
[577] III "-1: bis (trifluoromethylsulfonyl) diazomethane
[578] III "-2: bis (phenylsulfonyl) diazomethane
[579] III "-3: bis (4-fluorophenylsulfonyl) diazomethane
[580] III "-4: bis (2,4,6-trifluorophenylsulfonyl) diazomethane
[581] IV "-1: Methylsulfonyl-benzoyl-diazomethane
[582] IV "-2: Phenylsulfonyl-benzoyl-diazomethane
[583] IV "-3: Phenylsulfonyl-4-fluorobenzoyl-diazomethane
[584] The organic basic compound is as follows.
[585] B-1: 2,4,5-triphenylimidazole
[586] B-2: 1,5-diazabicyclo [4.3.0] nona-5-ene
[587] B-3: 4-dimethylaminopyridine
[588] B-4: 1,8-diazabicyclo [5.4.0] undec-7-ene
[589] B-5: N-cyclohexyl-N'-morpholinoethylthiourea
[590] Regarding surfactant, it is as follows.
[591] W-1: Troisol S-366 (Troy Chemical Co., Ltd. product)
[592] W-2: Mega Pack F176 (Dainippon Ink Co., Ltd. product)
[593] W-3: Mega Pack R08 (Dainippon Ink Co., Ltd. product)
[594] W-4: Polysiloxane Polymer KR-341 (Shinhetsu Kogyo Co., Ltd. product)
[595] W-5: Cypress S-382 (Asahi Glass Co., Ltd. product)
[596] Table 7
[597] Sensitivity (mC / ㎠)Resolution (μm)Edge Roughness (nm) Example 241.00.046 Example 251.00.045 Example 261.50.056 Example 271.20.047 Example 281.10.057 Example 291.30.065 Example 301.80.056 Example 311.00.047 Example 320.80.044 Example 331.10.045 Example 341.30.058 Example 350.70.066 Example 360.50.056 Example 371.10.045 Example 381.20.066 Comparative Example 34.00.1014 Comparative Example 41.10.0922
[598] In the results of Table 7, the positive resist composition of the present invention was found to have high sensitivity and high resolution, and excellent edge roughness of the line pattern.
[599] In Examples 24 to 38, the solvent was changed to propylene glycol monomethyl ether acetate / propylene glycol monomethyl ether = 80/20 (volume ratio), and was carried out in the same manner to obtain the same result.
[600] (4) Patterning by the same magnification X-ray irradiation
[601] Using the resist compositions of Examples 24 and 34 and Comparative Example 3, respectively, a resist film having a film thickness of 0.40 탆 was obtained in the same manner as in (1) above. Next, except that the same magnification X-ray irradiation apparatus (gap value) 20 was used, patterning was carried out in the same manner as in (2), and the resist performance was evaluated in the same manner as in (3). The evaluation results are shown in Table 8.
[602] Table 8
[603] Sensitivity (mJ / ㎠)Resolution (μm)Edge Roughness (nm) Example 24500.096 Example 34400.088 Comparative Example 31400.1519
[604] As shown in Table 8, it is found that the resist composition of the present invention exhibits extremely excellent performance even in X-ray irradiation.
[605] (2) Synthesis of Resin
[606] Synthesis Example 1
[607] 32.4 g (0.2 mol) of p-acetoxystyrene was dissolved in 120 ml of butyl acetate, stirred under a stream of nitrogen, and 0.033 g of azobisisobutylnitrile (AIBN) was added three times at an interval of 3 hours at 83 ° C. The polymerization reaction was carried out by continuing stirring for 6 hours. The reaction solution was poured into 1200 ml of hexane to precipitate a white resin. The obtained resin was dried and dissolved in 150 ml of methanol.
[608] An aqueous solution of 7.7 g (0.19 mol) of sodium hydroxide / 50 ml of water was added thereto, and the mixture was hydrolyzed by heating under reflux for 3 hours. Thereafter, 200 ml of water was added and diluted, and neutralized with hydrochloric acid to precipitate a white resin. This resin was separated by filtration, washed with water and dried. Further, the solution was dissolved in 200 ml of tetrahydrofuran, and dripped and reprecipitation was carried out with vigorous stirring in 5 L of ultrapure water. This reprecipitating operation was repeated three times. The obtained resin was dried in a vacuum dryer at 120 ° C. for 12 hours to obtain poly (p-hydroxystyrene) [resin R-1].
[609] The weight average molecular weight of obtained resin was 13,000.
[610] Synthesis Example 2
[611] Based on the conventional method, 35.25 g (0.2 mol) of dehydrated and distilled and purified p-tert-butoxystyrene monomer and 5.21 g (0.05 mol) of styrene monomer were dissolved in 100 ml of tetrahydrofuran. Under nitrogen stream and stirring, 0.033 g of azobisisobutylnitrile (AIBN) was added three times at an interval of 3 hours at 83 ° C, and the polymerization was carried out by continuing stirring for an additional 6 hours. The reaction solution was poured into 1200 ml of hexane to precipitate a white resin. The obtained resin was dried and dissolved in 150 ml of tetrahydrofuran. After 4N hydrochloric acid was added thereto and hydrolyzed by heating under reflux for 6 hours, it was again immersed in 5 L of ultrapure water, and this resin was separated by filtration, washed with water and dried. Furthermore, it was dissolved in 200 ml of tetrahydrofuran, and dripped and reprecipitation was performed with vigorous stirring with 5 L of ultrapure water. This reprecipitating operation was repeated three times. The obtained resin was dried in a vacuum dryer at 120 ° C. for 12 hours to obtain a poly (p-hydroxystyrene / styrene) copolymer (resin R-2).
[612] The weight average molecular weight of obtained resin was 11,000.
[613] Synthesis Example 3
[614] 40 g (0.33 mol) of p-hydroxystyrene
[615] 10.7 g (0.08 mol) tert-butyl acrylate
[616] 50 g of dioxane
[617] Was dissolved in the solution, and 8 g of azobisisobutylnitrile (AIBN) was added thereto, followed by heating stirring at 60 DEG C for 8 hours under a nitrogen stream. The reaction solution was poured into 1200 ml of hexane to precipitate a white resin.
[618] The obtained resin was dried, dissolved in acetone, and dripped and reprecipitation was carried out with vigorous stirring with 5 L of ultrapure water. This reprecipitating operation was repeated three times. The obtained resin was dried in a vacuum dryer at 120 ° C. for 12 hours to obtain a poly (p-hydroxystyrene / tert-butylacrylate) copolymer [resin R-3].
[619] The weight average molecular weight of obtained resin was 21,000.
[620] Synthesis Example 4
[621] 24 g of poly (p-hydroxystyrene) Nippon Soutatsu Co., Ltd. (molecular weight 8,000) was dissolved in 100 ml of dioxane, followed by bubbling with nitrogen for 30 minutes. 13.1 g of di-tert-butyl-dicarbonates were added to this solution, and 36 g of triethylamines were dripped with stirring. After the dropwise addition, the reaction solution was stirred for 5 hours. This reaction liquid was dripped at 1 weight% ammonium aqueous solution, and the polymer was deposited. The obtained resin was dried, dissolved in acetone, and dripped and reprecipitation was carried out with vigorous stirring in 5 L of ultrapure water. This reprecipitating operation was repeated three times. The obtained resin was dried in a vacuum dryer at 120 ° C. for 12 hours to obtain a poly (p-hydroxystyrene / p-tert-butoxycarbonyloxystyrene) copolymer [Resin R-4].
[622] The weight average molecular weight of obtained resin was 8,300.
[623] Synthesis Example 5
[624] 70 g of poly (p-hydroxystyrene) Nippon Soutatsu Kabushigayashi (molecular weight 8,000) was dissolved in 320 g of propylene glycol methyl ether acetate (PGMEA), and 0.35 g of p-toluene sulfonic acid pyridinium salt was further added. It was dissolved by heating at ℃. The mixture was decompressed to 60 ° C and 20 mmHg, and about 40 g of solvent was removed together with the water remaining in the system. After cooling to 20 ° C, 18.9 g of benzyl alcohol was dissolved. Thereafter, 17.5 g of tert-butyl vinyl ether was added, and stirring was continued at 20 ° C. for 5 hours. Furthermore, 5.5 g of pyridine was added, followed by addition of 5.9 g of acetic anhydride, followed by stirring at 20 ° C. for 1 hour and 30 minutes. 280 ml of ethyl acetate was added to the reaction mixture, and 140 ml of water and 12 ml of acetone were added to carry out an extraction operation. After repeated washing with water three times, the removal was carried out at 60 ℃, 20mmHg to remove moisture in the system. In addition, the obtained resin solution was diluted with acetone and precipitated with a large amount of hexane to obtain a white resin.
[625] This operation was repeated three times, and the obtained resin was dried by heating in a vacuum dryer at 40 ° C. for 24 hours to dry poly (p-hydroxystyrene / p- (1-benzyloxyethoxy) styrene / p-acetoxystyrene). A copolymer [resin R-5] was obtained.
[626] The weight average molecular weight was 8,400.
[627] Synthesis Example 6
[628] The same operation as in Synthesis Example 5 was carried out except that 70 g of poly (p-hydroxystyrene) [alkali-soluble resin R-1] was used, and 22.0 g of phenethyl alcohol was used instead of benzyl alcohol, and poly (p- Hydroxystyrene / p- (1-phenoxyethoxy) butylene / p-acetoxystyrene) copolymer [resin R-6] was obtained. The weight average molecular weight was 13,800.
[629] Synthesis Example 7
[630] 70 g of poly (p-hydroxystyrene / styrene) [alkaline soluble resin R-2] was dissolved in 320 g of PGMEA, and 0.35 g of p-toluenesulfonic acid pyridinium salt was added thereto, followed by dissolution at 60 ° C. The mixture was depressurized to 60 mmHg and 20 mmHg, and about 40 g of solvent was removed with water remaining in the system. It cooled to 20 degreeC, and added 8.7 g of ethyl vinyl ether. Then, stirring was continued at 20 degreeC for 5 hours. After 0.3 g of triethylamine was added, 280 ml of ethyl acetate was added to the reaction mixture, and 140 ml of water and 12 ml of acetone were added to carry out an extraction operation. After the washing operation was repeated three times, removal was carried out at 60 ° C. and 20 mm Hg to remove water in the system, and poly (p-hydroxystyrene / p- (1-ethoxyethoxy) styrene / styrene) copolymer [ Resin R-7].
[631] The weight average molecular weight was 12,600.
[632] Synthesis Example 8
[633] The same operation as in Synthesis Example 7 was carried out except that 70 g of poly (p-hydroxystyrene / tert-butylacrylate) [resin R-3] was used, and poly (p-hydroxystyrene / p- (1- Ethoxyethoxy) styrene / tert-butylacrylate) copolymer [resin R-8] was obtained. The weight average molecular weight was 22,000.
[634] (3) Low molecular weight compound of (c ')
[635] The compound ((c ')-1-(c')-16) used by the Example of this invention, and the compound (comparative example-1) used by the comparative example are shown below.
[636]
[637]
[638] The Ip value of X 'corresponding part (X'-H) in Formula (I) which the low molecular weight compound of said (c') holds is as follows.
[639] Calculations were made using MOPAC (PM3 parameters) from Oxford Molecular, software-CAChe 4.1.1.
[640] Table 9
[641] Low molecular weight compoundsStructure of (X'-H)Ip value of X'-H (c ')-1X'-18.716 (c ')-2X'-28.725 (c ')-3X'-18.716 (c ')-4X'-28.725 (c ')-5X'-28.725 (c ')-6X'-18.716 (c ')-7X'-38.829 (c ')-8X'-38.829 (c ')-9X'-38.829 (c ')-10X'-38.829 (c ')-11X'-38.829 (c ')-12X'-38.829 (c ')-13X'-38.829 (c ')-14X'-38.829 (c ')-15X'-48.248 (c ')-16X'-48.248 Comparative Example-1X'-510.840
[642] Moreover, the structure of X'-1-X'-5 is shown below.
[643]
[644] 2. Example [Comparative Example 39-54 and Comparative Example 5]
[645] (1) resist drawing
[646] Resin (R-3) (2 g), acid generator (I-1) (0.12 g), low molecular weight compound ((c) -1), (0.2 g), nitrogen-containing basic compound B-1 (0.0065 g), Surfactant W-1 (0.0022 g) was dissolved in 21.5 g of propylene glycol monomethyl ether acetate, and this was filtered through a 0.1 µm Teflon filter to prepare a resist solution of Example 1.
[647] Similarly, as shown in Table 2, the kind of each component was changed and the resist solution of Examples 2-16 and Comparative Examples 1-2 was produced.
[648] Each sample solution was applied onto a silicon wafer using a spin coater, dried at 120 ° C. for 90 seconds on a vacuum suction hot plate to obtain a resist film having a thickness of 0.5 μm.
[649] (2) Preparation of resist pattern
[650] The resist film was irradiated with an electron beam lithography apparatus (pressurized voltage 50 KV).
[651] After irradiation, heating was carried out (60 seconds at 110 ° C.) on a vacuum adsorption hot plate, respectively, immersed for 60 seconds in a 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution, and rinsed with water for 30 seconds to dry.
[652] The cross-sectional shape of the obtained contact hole pattern and the line and space pattern was observed with a scanning electron microscope.
[653] (3) evaluation of sensitivity and resolution
[654] Sensitivity was taken as the minimum irradiation dose when resolving a 0.2 micrometer line (line: space = 1: 1), and limit resolution (line and space separation resolution) in the irradiation dose was made into resolution. When the 0.20 µm line (line: space = 1: 1) was not resolved, the limit resolution was regarded as resolution, and the irradiation dose at that time was regarded as sensitivity.
[655] The evaluation of PED stability was performed as follows.
[656] When forming a resist pattern, it carried out by the method similar to (2) except having added the process of leaving to stand in an electron beam lithography apparatus for 120 minutes after irradiation. The sensitivity and resolution were determined in the same manner as in (3).
[657] The smaller the difference between the sensitivity, the resolution value, and the sensitivity and resolution value measured in the above (3), the better the PED stability.
[658] Table 10
[659] ExampleSuzyLow molecular weight compound (g)Acid generatorNitrogen-containing basic compoundsSurfactants 39R-3(c ')-1 0.20 gI'-1B-1W-1 40R-4(c ')-2 0.25 gI'-7B-1W-2 41R-5(c ')-3 0.22 gI'-8B-1W-1 42R-6(c ')-4 0.33 gI'-9B-3W-1 43R-7(c ')-5 0.30 gI'-13B-5W-3 44R-8(c ')-6 0.27 gI'-16B-1W-5 45R-3(c ')-7 0.40 gI'-21B-2W-2 46R-5(c ')-8 0.30 gII'-1B-1W-4 47R-7(c ')-9 0.17 gIII'-1B-4W-1 48R-4(c ')-10 0.20 gI'-9B-5W-1 49R-2(c ')-11 0.25 gI'-7B-1W-3 50R-6(c ')-12 0.22 gI'-1B-3W-2 51R-8(c ')-13 0.30 gI'-16B-5W-1 52R-5(c ')-14 0.23 gII'-1B-2W-2 53R-2(c ')-15 0.25 gI'-8B-4W-5 54R-6(c ')-16 0.28 gI'-13B-1W-1 Comparative Example 5R-3Comparative-1-0.20 gI'-1B-3W-1
[660] The symbol used in Table 10 shows the following content.
[661] The organic basic compound is as follows.
[662] B-1: 2,4,5-triphenylimidazole
[663] B-2: 1,5-diazabicyclo [4.3.0] nona-5-ene
[664] B-3: 4-dimethylaminopyridine
[665] B-4: 1,8-diazabicyclo [5.4.0] undec-7-ene
[666] B-5: N-cyclohexyl-N'-morpholinoethylthiourea
[667] Regarding surfactant, it is as follows.
[668] W-1: Troisol S-366 (Troy Chemical Co., Ltd. product)
[669] W-2: Mega Pack F176 (Dainippon Ink Co., Ltd. product)
[670] W-3: Mega Pack R08 (Dainippon Ink Co., Ltd. product)
[671] W-4: Polysiloxane Polymer KR-341 (Shinhetsu Kogyo Co., Ltd. product)
[672] W-5: Cypress S-382 (Asahi Glass Co., Ltd. product)
[673] Table 11
[674] ExampleSensitivity (μC / ㎠)Resolution (μm) Time from heating after irradiationTime until heating after irradiation Immediately after the investigation120 minutesImmediately after the investigation120 minutes 390.60.70.080.08 400.70.70.050.05 410.90.90.070.07 420.80.90.040.04 431.21.20.050.05 440.91.00.050.06 451.31.30.070.07 461.51.60.080.08 471.11.10.060.07 480.80.80.060.06 490.91.00.070.07 501.21.20.080.08 511.41.50.040.04 520.70.80.040.04 531.31.40.060.07 541.11.10.050.05 Comparative Example 54.56.00.120.13
[675] In the results of Table 11, the positive resist composition of the present invention was found to be high sensitivity and high resolution, good PED stability, and in particular, good stability against sensitivity change by PED.
[676] In Examples 39 to 54, the solvent was changed to propylene glycol monomethyl ether acetate / propylene glycol monomethyl ether = 80/20 (volume ratio), and was carried out in the same manner to obtain the same result.
[677] (4) Patterning by the same magnification X-ray exposure
[678] Using the resist compositions of Examples 39 and 49 and Comparative Example 5, respectively, a resist film having a film thickness of 0.40 탆 was obtained in the same manner as in (1) above. Next, patterning was carried out in the same manner as in (2) except that the same magnification X-ray exposure apparatus (gap value; 20 nm) was used, and the resist performance was evaluated in the same manner as in (3).
[679] Table 12 shows the results of the evaluation.
[680] Table 12
[681] ExampleSensitivity (mj / ㎠)Resolution (μm) Time until we heat after irradiationTime from heating after irradiation Immediately after the investigation120 minutesImmediately after the investigation120 minutes 3940430.090.10 4950520.080.09 Comparative Example 51702400.160.20
[682] As shown in Table 12, it is found that the resist composition of the present invention exhibits extremely excellent performance even in X-ray exposure.
[683] The positive resist composition for electron beams or X-rays of the present invention has high sensitivity, high resolution, and good PED stability.

权利要求:
Claims (26)
[1" claim-type="Currently amended] (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
(b1) a resin having a residue of a compound which exhibits an ionization potential value smaller than the ionization potential value of p-ethylphenol in a group detached by the action of an acid, and having increased solubility in an alkaline developer by the action of an acid; And
(c) The positive resist composition for electron beams or X-rays containing 1 or more types of acetal compounds represented by general formula (A) or general formula (B).

(In formula (A) or (B), R ₁ ′ and R ₂ ′ independently represent an organic group having 1 to 30 carbon atoms.)
[2" claim-type="Currently amended] The resin (b1) according to claim 1, wherein the resin (b1) is a resin obtained by reacting an alkali-soluble polymer having a hydroxyl group with a vinyl ether compound represented by the general formula (C) and an alcohol compound represented by the general formula (D) under an acid catalyst. A positive resist composition for electron beam or X-ray, characterized in that.

(In formula (C), R < ₃ '> represents a C1-C30 organic group.
In formula (D), W represents a divalent organic group. X is an organic group and is group which shows the value of ionization potential (Ip) of HO-X being smaller than the Ip value of p-ethylphenol. n represents the integer of 0-4. When n is 2-4, several W may be same or different.)
[3" claim-type="Currently amended] (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
(b2) Resin which has a repeating unit represented by Formula (I), and whose solubility to alkaline developing solution increases by the action of an acid; And
(c) at least one of the acetal compounds represented by the general formula (A) or (B) according to claim 1
A positive resist composition for electron beams or X-rays, comprising:
Formula (I)

(In formula (I), R ¹ represents a hydrogen atom or a methyl group. R ² and R ³ each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. W, X and n are the same as above.)
[4" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 2, wherein X is represented by formula (II).
Formula (II)

(In Formula (II), L is a single bond or an alkylene group, Y is group chosen from following formula (A ')-(E').

R ^{4 's} each independently represent a linear or branched alkyl group having 1 to 6 carbon atoms. n1 is an integer of 0-3, n2 is an integer of 0-7, n3 is an integer of 0-9, n4 is an integer of 0-9, n5 is an integer of 0-9.)
[5" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 3, wherein X is represented by the formula (II).
[6" claim-type="Currently amended] The electron beam according to any one of claims 1 to 5, wherein the total amount of the (c) acetal compound is 0.1 part by weight or more and less than 100 parts by weight with respect to the total weight of the polymer of (b1) or (b2). Or a positive resist composition for X-rays.
[7" claim-type="Currently amended] The method according to any one of claims 1 to 5, wherein (a)
(a1) The positive resist composition for electron beams or X-rays represented by any one of Formula (I ')-(III') and containing a compound which generate | occur | produces an acid by irradiation of an electron beam or X-rays.

(Wherein, R ₁ to R ₃₇ are the same or different and represent a hydrogen atom, a straight chain, a branched or cyclic alkyl group, a straight chain, a branched or cyclic alkoxy group, a hydroxyl group, a halogen atom or a -SR ₃₈ group. R ₃₈ represents a linear, branched or cyclic alkyl group or an aryl group, and two or more of R ₁ to R ₁₅ , R ₁₆ to R ₂₇ , and R ₂₈ to R ₃₇ bond to each other to form a single bond, carbon, or oxygen; Or 1 or 2 or more types selected from sulfur, sulfur, and nitrogen may be contained to form a ring.
X ⁻ represents an anion of sulfonic acid.)
[8" claim-type="Currently amended] The total amount of the (c) acetal compound is 0.1 part by weight or more and less than 100 parts by weight with respect to the total weight of the polymer of (b1) or (b2), (A) above
(a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and containing the compound which generate | occur | produces an acid by irradiation of an electron beam or X-rays.
[9" claim-type="Currently amended] (a2) A compound represented by any one of formulas (I ") to (IV") and generating an acid by electron beam or X-ray irradiation;
(b1) a resin having a residue of a compound which exhibits an ionization potential value smaller than the ionization potential value of p-ethylphenol in the group detached by the action of an acid, and having increased solubility in an alkaline developer by the action of an acid; And
(d) solvent
A positive resist composition for electron beam or X-ray, characterized by containing a.


In formula (I "), Ar <^3> , Ar <^4> respectively independently represents a substituted or unsubstituted alkyl group, an aryl group, an aralkyl group, or a camphor group.
In formula (II "), R ²⁰⁶ represents a substituted or unsubstituted alkyl, aryl, aralkyl or camphor group. A represents a substituted or unsubstituted alkylene, alkenylene or arylene group.
In formulas (III ") and (IV"), R ⁰ and R each independently represent an alkyl group or an aryl group which may have a substituent.)
[10" claim-type="Currently amended] 10. The positive resist composition for electron beams or X-rays according to claim 9, wherein the resin (b1) contains a repeating unit represented by formula (I).
Formula (I)

(In formula (I), R <^1> represents a hydrogen atom or a methyl group, R <^2> , R <^3> respectively independently represents a hydrogen atom or a C1-C4 alkyl group. W, X, and n are the same as the above.)
[11" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 9 or 10, wherein the compound of (a2) generates aromatic sulfonic acid.
[12" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 9 or 10, wherein the compound of (a2) generates fluorine-containing sulfonic acid.
[13" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 9 or 10, wherein the compound of (a2) generates aromatic sulfonic acid and fluorine-containing sulfonic acid.
[14" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 9 or 10, wherein the compound of (a2) generates an aromatic sulfonic acid containing fluorine.
[15" claim-type="Currently amended] The compound according to claim 9 or 10, wherein in addition to the compound of (a2),
(a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by electron beam or X-ray irradiation.
[16" claim-type="Currently amended] The compound of claim 9 or 10, wherein the compound of (a2) generates an aromatic sulfonic acid,
(a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by irradiation of an electron beam or X-ray.
[17" claim-type="Currently amended] The compound of claim 9 or 10, wherein the compound of (a2) generates fluorine-containing sulfonic acid,
(a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by irradiation of an electron beam or X-rays.
[18" claim-type="Currently amended] The compound according to claim 9 or 10, wherein the compound of (a2) generates aromatic sulfonic acid and fluorine-containing sulfonic acid,
(a1) The positive resist composition for electron beams or X-rays represented by any one of said Formula (I ')-(III'), and further containing the compound which generate | occur | produces an acid by irradiation of an electron beam or X-ray.
[19" claim-type="Currently amended] The compound of claim 9 or 10, wherein the compound of (a2) generates an aromatic sulfonic acid containing fluorine,
(a1) The positive resist composition for an electron beam or X-ray, represented by any one of the formulas (I ') to (III'), further comprising a compound which generates an acid by irradiation with an electron beam or X-ray.
[20" claim-type="Currently amended] (a) a compound which generates an acid by irradiation of an electron beam or X-rays;
(b) resins having increased solubility in alkaline developing solutions due to the action of acids;
(c ') a low molecular weight compound having a residue of a compound whose ionization potential (Ip) value is smaller than the Ip value of p-ethylphenol and stable to acid; And
(d) solvent
A positive resist composition for electron beam or X-ray, characterized by containing a.
[21" claim-type="Currently amended] 21. The positive resist composition for electron beam or X-ray according to claim 20, wherein the compound of (c ') is represented by formula (E).
Formula (E)

(X ': group in which the ionization potential (Ip) value of H-X' is smaller than the Ip value of p-ethylphenol).
W: divalent organic group
Z is independently -OH, -OR ', -O-CO-R', -O-CO-OR ', -O-CO-NH-Ra, -O-CO-N (Ra) (Rb),- NH-CO-R ', -NH-CO-OR', -NH-SO ₂ -R ', -NRa-CO-R', -NRa-CO-OR ', -NRa-SO ₂ -R',- CO-OR ', -CO-NH-Ra, -CO-NH-SO ₂ -R, -CO-NRa-SO ₂ -R', -CO-N (Ra) (Rb), -CN Being.
R ', Ra, Rb: The C1-C10 alkyl group or aryl group which may respectively independently have a substituent.
n is an integer of 1-3.
When n is 2-4, some W may be same or different.)
[22" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to claim 21, wherein X 'in formula (E) is a group selected from formulas (A') to (E ').

(R ⁴ each independently represents a linear or branched alkyl group having 1 to 6 carbon atoms. N1 is an integer of 0 to 3, n2 is an integer of 0 to 7, n3 is an integer of 0 to 9, n4 is 0 to 9 Integer, n5 represents the integer of 0-9.)
[23" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to any one of claims 20 to 22, wherein the compound of (a) generates an aromatic sulfonic acid.
[24" claim-type="Currently amended] 23. The positive resist composition according to any one of claims 20 to 22, wherein the compound of (a) generates fluorine-containing sulfonic acid.
[25" claim-type="Currently amended] 23. The positive resist composition according to any one of claims 20 to 22, wherein the compound of (a) generates aromatic sulfonic acid and fluorine-containing sulfonic acid.
[26" claim-type="Currently amended] The positive resist composition for electron beams or X-rays according to any one of claims 20 to 22, wherein the compound (a) generates an aromatic sulfonic acid containing fluorine.

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同族专利:

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公开号 | 公开日

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TW562999B|2003-11-21|

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KR100886635B1|2009-03-04|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2001-05-09|Priority to JPJP-P-2001-00138738

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2001-05-09|Priority to JP2001138738A

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2001-05-11|Priority to JPJP-P-2001-00141626

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2001-05-11|Priority to JP2001142185A

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2001-05-11|Priority to JP2001141626A

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2001-05-11|Priority to JPJP-P-2001-00142185

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2002-05-08|Application filed by 후지 샤신 필름 가부시기가이샤

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2003-01-23|Publication of KR20030006957A

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2009-03-04|Application granted

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2009-03-04|Publication of KR100886635B1

优先权:

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申请号 | 申请日 | 专利标题

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JPJP-P-2001-00138738|2001-05-09|

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JP2001138738A|JP4174193B2|2001-05-09|2001-05-09|Positive resist composition for electron beam or X-ray|

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JP2001141626A|JP2002341523A|2001-05-11|2001-05-11|Positive resist composition for electron beam or x-ray|

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JPJP-P-2001-00142185|2001-05-11|

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JPJP-P-2001-00141626|2001-05-11|

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JP2001142185A|JP2002341538A|2001-05-11|2001-05-11|Positive resist composition for electron beam or x ray|